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公开(公告)号:US20230366668A1
公开(公告)日:2023-11-16
申请号:US18354635
申请日:2023-07-18
Applicant: CKD CORPORATION , UTSUNOMIYA UNIVERSITY
Inventor: Hiroyuki Ishigaki , Tomoru Okada , Ikuo Futamura , Takahiro Mamiya , Yoshio Hayasaki
IPC: G01B9/02015 , G01B9/02001
CPC classification number: G01B9/0203 , G01B9/02007 , G01B9/02024 , G01B2290/45
Abstract: A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.