公开(公告)号：US10101225B2

公开(公告)日：2018-10-16

申请号：US15119311

申请日：2015-05-06

Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.

Inventor： Dongbiao Qian

IPC: G01L1/24 ,  G01L1/04

Abstract: Provided is a pressure sensor that includes a detection film that is arranged on a silicon substrate, detects a pressure applied to a surface thereof, and generates a protrusion deformation in response to the pressure. The pressure sensor also includes an optical transmitter and an optical detector that are arranged on the silicon substrate on opposite sides of the detection film and are located at a plane parallel to a plane comprising the detection film. The pressure sensor also includes a pressure calculation module that is connected to the optical detector and is used for acquiring light intensity data and calculating a pressure value according to the light intensity data. Also provided is a method of manufacturing the pressure sensor.