公开(公告)号：US09903884B2

公开(公告)日：2018-02-27

申请号：US14435925

申请日：2013-08-30

Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.

Inventor： Meihan Guo ,  Xinwei Zhang ,  Changfeng Xia ,  Wei Su

IPC: G01P15/125 ,  H02N1/08 ,  B81B7/02

CPC classification number: G01P15/125 ,  B81B7/02 ,  G01P2015/0837 ,  H01G5/16 ,  H02N1/08

Abstract: A parallel plate capacitor includes a first polar plate (10), and a second polar plate disposed opposite to the first polar plate (10). The parallel plate capacitor further includes at least a pair of sensitive units disposed on a substrate forming the first polar plate (10); the sensitive units includes sensitive elements (21a, 21b, 22a, 22b) and element connecting arms (23a, 23b, 24a, 24b) connecting the sensitive elements (21a, 21b, 22a, 22b) to the first polar plate (10). The parallel plate capacitor further includes anchoring bases (30, 31, 32, 33) disposed on a substrate where the second polar plate is located; the anchoring bases (30, 31, 32, 33) are connected to the element connecting arms (23a, 23b, 24a, 24b) via cantilever beams (30a, 30b, 31a, 31b, 32a, 32b, 33a, 33b); each element connecting arm (23a, 23b, 24a, 24b) is connected to at least two anchoring bases (30, 31, 32, 33), which are symmetric with respect to the element connecting arm. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. An acceleration sensor including the parallel plate capacitor is also provided.

公开(公告)号：US20150233965A1

公开(公告)日：2015-08-20

申请号：US14435925

申请日：2013-08-30

Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.

Inventor： Meihan Guo ,  Xinwei Zhang ,  Changfeng Xia ,  Wei Su

IPC: G01P15/125 ,  B81B7/02 ,  H02N1/08

CPC classification number: G01P15/125 ,  B81B7/02 ,  G01P2015/0837 ,  H01G5/16 ,  H02N1/08

Abstract: A parallel plate capacitor includes a first polar plate (10), and a second polar plate disposed opposite to the first polar plate (10). The parallel plate capacitor further includes at least a pair of sensitive units disposed on a substrate forming the first polar plate (10); the sensitive units includes sensitive elements (21a, 21b, 22a, 22b) and element connecting arms (23a, 23b, 24a, 24b) connecting the sensitive elements (21a, 21b, 22a, 22b) to the first polar plate (10). The parallel plate capacitor further includes anchoring bases (30, 31, 32, 33) disposed on a substrate where the second polar plate is located; the anchoring bases (30, 31, 32, 33) are connected to the element connecting arms (23a, 23b, 24a, 24b) via cantilever beams (30a, 30b, 31a, 31b, 32a, 32b, 33a, 33b); each element connecting arm (23a, 23b, 24a, 24b) is connected to at least two anchoring bases (30, 31, 32, 33), which are symmetric with respect to the element connecting arm. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. An acceleration sensor including the parallel plate capacitor is also provided.

Abstract translation: 平行板电容器包括第一极板（10）和与第一极板（10）相对设置的第二极板。 平行板电容器还包括至少一对设置在形成第一极板（10）的基板上的敏感单元。 敏感单元包括将敏感元件（21a，21b，22a，22b）连接到第一极板（10）的敏感元件（21a，21b，22a，22b）和元件连接臂（23a，23b，24a，24b）。 平行板电容器还包括设置在第二极板所在的基板上的固定基座（30,31,32,33）。 通过悬臂梁（30a，30b，31a，31b，32a，32b，33a，33b）将锚定基座（30,31,32,33）连接到元件连接臂（23a，23b，24a，24b） 每个元件连接臂（23a，23b，24a，24b）连接到至少两个相对于元件连接臂对称的锚定基座（30,31,32,33）。 并联平板电容更可能受到外部因素的影响，因此更容易发生电容变化。 还提供了包括平行板电容器的加速度传感器。