公开(公告)号：US20140203195A1

公开(公告)日：2014-07-24

申请号：US13747263

申请日：2013-01-22

Applicant: CYMER, INC.

Inventor： Vladimir Fleurov ,  Igor Fomenkov ,  Shailendra Srivastava

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003 ,  H05G2/005

Abstract: A first temperature distribution that represents a temperature of an element adjacent to and distinct from a first optical element that is positioned to receive an amplified light beam is accessed. The accessed first temperature distribution is analyzed to determine a temperature metric associated with the element, the determined temperature metric is compared to a baseline temperature metric, and an adjustment to position of the amplified light beam relative to the first optical element is determined based on the comparison.

Abstract translation: 访问表示与位于接收放大光束的第一光学元件相邻且不同的元件的温度的第一温度分布。 分析访问的第一温度分布以确定与元件相关联的温度度量，将确定的温度度量与基线温度度量进行比较，并且基于放大光束相对于第一光学元件的位置的调整，基于 比较。