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公开(公告)号：US10578881B2
公开(公告)日：2020-03-03
申请号：US16220212
申请日：2018-12-14
Applicant: Carl Zeiss AG , Carl Zeiss SMT GmbH
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
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Patent Agency Ranking
2.发明申请公开(公告)号：US20190121145A1
公开(公告)日：2019-04-25
申请号：US16220212
申请日：2018-12-14
Applicant: Carl Zeiss AG , Carl Zeiss SMT GmbH
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
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公开(公告)号：US09904060B2
公开(公告)日：2018-02-27
申请号：US14311420
申请日：2014-06-23
Applicant: Carl Zeiss AG , Carl Zeiss SMT GmbH
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
CPC classification number: G02B27/0961 , G02B26/0833 , G02B27/0905 , G03F1/84
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
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4.发明申请ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING SUCH AN ILLUMINATION OPTICAL UNIT 有权用于包含这样的照明光学单元的计量系统和计量系统的照明光学单元公开(公告)号：US20150001408A1
公开(公告)日：2015-01-01
申请号：US14311420
申请日：2014-06-23
Applicant: Carl-Zeiss AG
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
CPC classification number: G02B27/0961 , G02B26/0833 , G02B27/0905 , G03F1/84
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
Abstract translation: 照明光学单元用于通过计量系统照亮要检查的物体。 照明光学单元具有光学瞳孔成形组件，用于在可以布置被检查物体的物场上产生照明光的照明角度的确定分布。 用于产生在物场上的照明光的确定的强度分布的光场成形组件设置在照明光束的光束路径中的瞳孔成形组件的下游。 场成形组件具有布置在照明光学单元的光瞳面的区域中的至少一个光场成形元件。 这导致照明光学单元，其确保可以关于在整个物场上的强度分布和照射角度分布以规定的方式设置的照明。
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公开(公告)号：US10168539B2
公开(公告)日：2019-01-01
申请号：US15895210
申请日：2018-02-13
Applicant: Carl Zeiss AG , Carl Zeiss SMT GmbH
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
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6.发明申请公开(公告)号：US20180173001A1
公开(公告)日：2018-06-21
申请号：US15895210
申请日：2018-02-13
Applicant: Carl Zeiss AG , Carl Zeiss SMT GmbH
Inventor： Thomas Frank , Dirk Doering , Holger Seitz , Mario Laengle , Ulrich Matejka
CPC classification number: G02B27/0961 , G02B26/0833 , G02B27/0905 , G03F1/84
Abstract: An illumination optical unit serves for illuminating objects to be examined by a metrology system. The illumination optical unit has an optical pupil shaping assembly for generating a defined distribution of illumination angles of illumination light over an object field in which an object to be examined can be arranged. An optical field shaping assembly for generating a defined intensity distribution of the illumination light over the object field is disposed downstream of the pupil shaping assembly in the beam path of the illumination light. The field shaping assembly has at least one optical field shaping element arranged in the region of a pupil plane of the illumination optical unit. This results in an illumination optical unit which ensures an illumination which can be set in a defined manner with regard to an intensity distribution and an illumination angle distribution over the entire object field.
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