Method for determining a best initial focal position estimate
    1.
    发明申请
    Method for determining a best initial focal position estimate 有权
    用于确定最佳初始焦点位置估计的方法

    公开(公告)号:US20020172964A1

    公开(公告)日:2002-11-21

    申请号:US10061525

    申请日:2002-02-01

    CPC classification number: G02B21/244 G02B7/28

    Abstract: The invention provides a method for a method for determining a best initial focal position estimate for a current sample location on a substrate comprising multiple sample locations, comprising determining the best initial focal position estimate by using a result from one or more techniques selected from the group consisting of linear regression analysis of focal positions determined for at least two other sample locations on the substrate and quadratic regression analysis of focal positions determined for at least three other sample locations on the substrate.

    Abstract translation: 本发明提供了一种用于确定包括多个样本位置的衬底上的当前样本位置的最佳初始焦点位置估计的方法的方法,包括通过使用选自组中的一种或多种技术的结果来确定最佳初始焦点位置估计 包括对基底上的至少两个其他样本位置确定的焦点位置的线性回归分析和对基底上的至少三个其他样本位置确定的焦点位置的二次回归分析。

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