公开(公告)号：US20110159700A1

公开(公告)日：2011-06-30

申请号：US12891939

申请日：2010-09-28

Applicant: Cheng Kuo Yeh

Inventor： Cheng Kuo Yeh

IPC: H01L21/033 ,  B05C3/02

CPC classification number: B05C3/02 ,  B05C3/09 ,  B05D1/20 ,  B05D1/206 ,  B82Y30/00 ,  B82Y40/00 ,  H01L2933/0091

Abstract: A film formation system and a film formation method are disclosed. The film formation method includes the following steps performed in the film formation system that includes a container containing liquid, a water draining means for draining the liquid, a ring-shaped component installed in the container, and a carrying component installed in the liquid in the container for carrying at least a substrate: enabling the carrying component in the liquid and enabling the ring-shaped component to float on the liquid; when a film layer that is composed of nano-spheres is formed on the liquid, locating the film layer in a ring of the ring-shaped component; and removing the liquid, allowing the film layer to move downward in accordance with the ring-shaped component and be formed on the substrate, thereby preventing the nano-spheres from contacting an inner wall of the container and bursting, through the installation of the ring-shaped component.

Abstract translation: 公开了一种成膜体系和成膜方法。 成膜方法包括在成膜系统中进行的以下步骤，其包括容纳液体的容器，用于排出液体的排水装置，安装在容器中的环形部件和安装在容器中的液体中的载体组件 用于承载至少一个基底的容器：使所述液体中的载体组分能够使所述环状组分漂浮在所述液体上; 当在液体上形成由纳米球形成的膜层时，将膜层定位在环状部件的环中; 并移除液体，使膜层根据环状部件向下移动并形成在基板上，从而防止纳米球体与容器的内壁接触并通过安装环形件而爆裂 形组件。