公开(公告)号：US20250128936A1

公开(公告)日：2025-04-24

申请号：US18383223

申请日：2023-10-24

Applicant: Connaught Electronics Ltd.

Inventor： Maurice DORE ,  Gerard CONWAY ,  Terrance MCDONALD ,  Enda WARD ,  Margaret GLAVIN

IPC: B81B7/00

Abstract: A MEMS device includes an electrical distribution substrate and a spacer ring extending upward therefrom. An actuator stator is positioned above the electrical distribution substrate and within the spacer ring. An outer frame extends from a floor of the actuator stator. An actuator rotor is suspended above the floor. A sensor is supported by the actuator rotor. A conductive stack is positioned above the spacer ring. A wire electrically connects the sensor to the conductive stack. A plurality of vias extending through the spacer ring and to the electrical distribution substrate, thereby allowing electrical communication between the sensor and the electrical distribution substrate while enabling vertical displacement of the sensor and actuator rotor.