公开(公告)号：US20240417241A1

公开(公告)日：2024-12-19

申请号：US18210679

申请日：2023-06-16

Applicant: Connaught Electronics Ltd.

Inventor： Gerard Conway ,  Enda Ward ,  Terrance McDonald ,  Maurice Dore

IPC: B81B7/00

Abstract: A MEMS device is provided with an actuator stator providing an electrical connection point. The MEMS device includes an electrical distribution substrate, and an actuator stator positioned above it. The actuator stator has a floor and an outer frame extending up from the floor. The MEMS device includes a stator pad disposed on the outer frame and above the electrical distribution substrate. The MEMS device also includes an actuator rotor suspended above the floor, within the outer frame, with a sensor mounted thereon. A wire bond interconnect electrically couples the sensor to the stator pad. In some embodiments, the outer frame includes a via extending therethrough which electrically connects the stator pad with the electrical distribution substrate, enabling an electrical connection between the sensor and the electrical distribution substrate. In some embodiments, a second wire bond interconnect electrically connects the stator pad and the substrate.