公开(公告)号：US20040057474A1

公开(公告)日：2004-03-25

申请号：US10670406

申请日：2003-09-24

Applicant: Cymer, Inc.

Inventor： Igor V. Fomenkov ,  Armen Kroyan ,  Jesse D. Buck ,  Palash P. Das ,  Richard L. Sandstrom ,  Frederick G. Erie ,  John Martin Algots ,  Gamaralalage G. Padmabandu

IPC: H01S003/10

CPC classification number: G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225

Abstract: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.

Abstract translation: 一种用于放电激光器带宽控制的技术。 提供线窄设备具有至少一个压电驱动器和快速带宽检测装置以及具有小于约1.0毫秒的时间响应的带宽控制。 在优选实施例中，波长调谐镜在非常窄的转角范围内以每秒超过500次抖动的抖动速率抖动，以使标称波长值的抖动产生期望的一系列激光脉冲的有效带宽。