Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
    1.
    发明申请
    Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator 审中-公开
    紧凑型晶圆处理系统,带单轴机器人手臂和预状态盒式电梯

    公开(公告)号:US20050111944A1

    公开(公告)日:2005-05-26

    申请号:US10723298

    申请日:2003-11-25

    CPC classification number: H01L21/67766

    Abstract: A robotic single axis system includes an effector moveable around a single rotating axis. The system is substantially concentrically arranged and mounted adjacent a wafer chuck of a precision stage. The robotic effector has a tangential distal end with a carrying face for positioning the wafer between concentric pinlifters raising from the wafer chuck. The pinlifters load and unload the wafer from the effector. The effector reaches with addition of the stage's travel into a cassette and alternating into a prealigner positioned on top of each other on an adjacent elevator. The elevator provides Z-axis movement so that the effector may load and unload wafers from the cassette, and alternating inserts a carried wafer into the prealigner.

    Abstract translation: 机器人单轴系统包括围绕单个旋转轴线可移动的效应器。 该系统基本上同心地布置和安装在精密级的晶片卡盘附近。 机器人效应器具有切向远端,其具有用于将晶片定位在从晶片卡盘升起的同心引导器之间的承载面。 引导者从效应器加载和卸载晶片。 效应器通过将舞台的行进添加到盒中并交替地放置在相邻电梯上彼此顶部定位的预对角器中。 电梯提供Z轴运动,使得效应器可以从盒装载和卸载晶片,并且将承载的晶片交替插入到预对准器中。

    Compact pinlifter assembly integrated in wafer chuck
    2.
    发明申请
    Compact pinlifter assembly integrated in wafer chuck 有权
    集成在晶片卡盘中的紧凑型引导组件

    公开(公告)号:US20050111161A1

    公开(公告)日:2005-05-26

    申请号:US10723449

    申请日:2003-11-25

    Applicant: Daniel Tran

    Inventor: Daniel Tran

    CPC classification number: H01L21/68742 Y10T279/11

    Abstract: A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter assembly includes wedge guides providing a movement path in a wedge angle relative to the wafer holding face. A pin actuator is driven along the wedge guides transforming its movement along the wedge guides into a vertical movement of the lifting pins perpendicularly sliding between the cavity and the wafer holding face. The combination of wedge guides and pin actuator takes advantage of the relatively large lateral dimensions of the wafer chuck to move the pin actuator between end positions that are in a distance multiple of the pin lifters movement. Due to the wedge angle, the actuators comparatively large scale movement is transformed in a highly precise, smooth and balanced movement of the pin lifters.

    Abstract translation: 小巧的销钉组件安装在晶片卡盘内的基本封闭的腔中,使得晶片卡盘的整体外部形状保持高度不受影响。 销钉组件包括楔形引导件,其提供相对于晶片保持面的楔形角度的移动路径。 销致动器沿着楔形导轨被驱动,将其沿着楔形导轨的运动变换成垂直于空腔和晶片保持面之间滑动的提升销的垂直运动。 楔形引导件和引脚致动器的组合利用了晶片卡盘的相对较大的横向尺寸以使销致动器在引脚升降器运动的几倍的端部位置之间移动。 由于楔形角度,致动器比较大的尺寸运动以高精度,平滑和均衡的升降器运动转变。

    Method and apparatus for selectable DC to DC conversion
    3.
    发明授权
    Method and apparatus for selectable DC to DC conversion 失效
    用于可选DC-DC转换的方法和装置

    公开(公告)号:US5684682A

    公开(公告)日:1997-11-04

    申请号:US503958

    申请日:1995-07-19

    CPC classification number: H02M3/07

    Abstract: A method and apparatus for DC-DC conversion. The apparatus includes a voltage detector (152) for detecting a voltage level in the circuit; a capacitive voltage doubler configuration of the DC to DC conversion circuits (130); a capacitive voltage tripler configuration of the DC to DC conversion circuits (130); selector circuitry (134) responsive to the voltage detector (152) for enabling the doubler or tripler configurations; and a voltage regulator (132) for regulating the converted DC voltages. The selector circuitry (134) initially enables the doubler, and then disables the doubler and enables the tripler when the voltage level drops below a reference voltage. In an alternate embodiment, high load signal HLVBB is provided when a high power load is to be enabled, such that the selector circuitry (134) temporarily disables the doubler and temporarily enables the tripler until the high load signal is inactive.

    Abstract translation: 一种用于DC-DC转换的方法和装置。 该装置包括用于检测电路中的电压电平的电压检测器(152) DC-DC转换电路(130)的容性倍压器配置; DC-DC转换电路(130)的容性电压三倍体配置; 选择器电路(134),其响应于所述电压检测器(152)以实现倍增器或三通道配置; 和用于调节转换的直流电压的电压调节器(132)。 选择器电路(134)最初使能倍频器,然后禁用倍频器,并且当电压电平下降到参考电压以下时,使能三通路。 在替代实施例中,当要启用高功率负载时,提供高负载信号HLVBB,使得选择器电路(134)暂时禁用倍增器,并且在高负载信号无效之前暂时使能三倍。

    AUTOMATED CHARACTERIZATION SYSTEM FOR LASER CHIP ON A SUBMOUNT
    4.
    发明申请
    AUTOMATED CHARACTERIZATION SYSTEM FOR LASER CHIP ON A SUBMOUNT 有权
    自动化表征系统,用于激光切片

    公开(公告)号:US20070200581A1

    公开(公告)日:2007-08-30

    申请号:US11674635

    申请日:2007-02-13

    Abstract: A temperature-controlled system for testing a laser die mounted on a submount is disclosed. The testing system comprises a base having a motor-driven translation platform. The translation platform includes a first testing site having a two-stage temperature control system mounted on a base portion. The temperature control system includes a thermoelectric cooler and a fluid system for circulating a cooling/heating fluid in a circulation block. A mounting portion is also included on the first testing site on which the submount is positioned. The temperature of the mounting portion is controlled by the temperature control system. A probe card having an arm and an electrical contact portion attached to the arm provides a power supply to the submount when the first testing site is aligned with the probe card. An aligner having a lens assembly that is alignable with the first testing site receives an optical signal produced by the laser.

    Abstract translation: 公开了一种用于测试安装在底座上的激光模具的温度控制系统。 测试系统包括具有马达驱动翻译平台的基座。 翻译平台包括具有安装在基部上的两级温度控制系统的第一测试位置。 温度控制系统包括热电冷却器和用于使循环块中的冷却/加热流体循环的流体系统。 安装部分也包括在第一个测试站点上,底座位于其上。 安装部分的温度由温度控制系统控制。 具有臂和连接到臂的电接触部分的探针卡在第一测试位置与探针卡对准时向基座提供电源。 具有可与第一测试部位对准的透镜组件的对准器接收由激光器产生的光学信号。

    Compact pinlifter assembly integrated in wafer chuck
    5.
    发明授权
    Compact pinlifter assembly integrated in wafer chuck 有权
    集成在晶片卡盘中的紧凑型引导组件

    公开(公告)号:US07044476B2

    公开(公告)日:2006-05-16

    申请号:US10723449

    申请日:2003-11-25

    Applicant: Daniel Tran

    Inventor: Daniel Tran

    CPC classification number: H01L21/68742 Y10T279/11

    Abstract: A compact pinlifter assembly is fitted in a substantially enclosed cavity within a wafer chuck such that an overall outside shape of the wafer chuck remains highly unaffected. The pinlifter assembly includes wedge guides providing a movement path in a wedge angle relative to the wafer holding face. A pin actuator is driven along the wedge guides transforming its movement along the wedge guides into a vertical movement of the lifting pins perpendicularly sliding between the cavity and the wafer holding face. The combination of wedge guides and pin actuator takes advantage of the relatively large lateral dimensions of the wafer chuck to move the pin actuator between end positions that are in a distance multiple of the pin lifters movement. Due to the wedge angle, the actuators comparatively large scale movement is transformed in a highly precise, smooth and balanced movement of the pin lifters.

    Abstract translation: 小巧的销钉组件安装在晶片卡盘内的基本封闭的腔中,使得晶片卡盘的整体外部形状保持高度不受影响。 销钉组件包括楔形引导件,其提供相对于晶片保持面的楔形角度的移动路径。 销致动器沿着楔形导轨被驱动,将其沿着楔形导轨的运动变换成垂直于空腔和晶片保持面之间滑动的提升销的垂直运动。 楔形引导件和引脚致动器的组合利用了晶片卡盘的相对较大的横向尺寸以使销致动器在引脚升降器运动的几倍的端部位置之间移动。 由于楔形角度,致动器比较大的尺寸运动以高精度,平滑和均衡的升降器运动转变。

    Disc clamping device for multiple standard discs
    6.
    发明授权
    Disc clamping device for multiple standard discs 有权
    用于多个标准光盘的光盘夹紧装置

    公开(公告)号:US07616301B2

    公开(公告)日:2009-11-10

    申请号:US10792655

    申请日:2004-03-03

    CPC classification number: G11B17/028 G11B17/0282

    Abstract: A vacuum assisted disc clamping device provides a number of fixture rings preferably concentrically stacked on a fixture body that is moveable in fixture ring stacking direction and actuated by a wedge drive to compensate for varying fixture levels associated with the individual fixture rings and disc standards. Each fixture ring includes a planar flange with a vacuum groove and a central conical portion that rises above the planar flange. The conical portion is defined with a diameter and cone angle such that a disc of corresponding dimensional standard may be readily placed on the fitting fixture ring with the disc bottom being sucked onto the planar flange while the disc hole centers on the conical portion.

    Abstract translation: 真空辅助盘夹紧装置提供多个固定环,优选地同心地堆叠在固定器本体上,该夹具主体可在固定环堆叠方向上移动,并由楔形驱动器驱动以补偿与各个固定环和盘标准相关联的变化的夹具水平。 每个固定环包括具有真空槽的平面凸缘和在平面凸缘上方上升的中心圆锥形部分。 锥形部分被限定为直径和锥角,使得相应的尺寸标准的盘可以容易地放置在装配固定环上,其中盘的底部被吸入平面凸缘上,而圆盘孔位于锥形部分上。

    Automated laser header testing
    7.
    发明授权
    Automated laser header testing 有权
    自动激光头测试

    公开(公告)号:US07595630B2

    公开(公告)日:2009-09-29

    申请号:US11535350

    申请日:2006-09-26

    CPC classification number: G01R31/2635

    Abstract: Systems for automated laser header testing are disclosed. A system can include a base portion, a rotary stage supported by the base portion, at least one testing site supported by the rotary stage, and a plurality of testing stations supported by the base portion and radially arranged about a center point of the rotary stage for testing the laser header. Each testing site can include a testing fixture supported by the testing site. The testing fixture can include an air shield providing an isolated environment for testing the laser header. The testing fixture can further include a heat sink and air ducts for controlling testing conditions. Electrical contact members can releasably contact leads of the laser header and a releasing mechanism releases the leads of the laser header from the electrical contact members.

    Abstract translation: 公开了用于自动化激光头测试的系统。 系统可以包括基部,由基部支撑的旋转台,由旋转台支撑的至少一个测试位置,以及由基部支撑并围绕旋转台的中心点径向设置的多个测试台 用于测试激光头。 每个测试站点都可以包括测试站点支持的测试夹具。 测试夹具可以包括空气屏蔽,其提供用于测试激光头的隔离环境。 测试夹具还可以包括用于控制测试条件的散热器和风道。 电接触构件可以可释放地接触激光头的引线,并且释放机构将激光头的引线从电接触构件释放。

    Photomask flipper and single direction inspection device for dual side photomask inspection
    8.
    发明授权
    Photomask flipper and single direction inspection device for dual side photomask inspection 有权
    双面光掩模检查的光掩模和单向检测装置

    公开(公告)号:US07290978B2

    公开(公告)日:2007-11-06

    申请号:US10865741

    申请日:2004-06-09

    Applicant: Daniel Tran

    Inventor: Daniel Tran

    CPC classification number: G03F7/70741 G01N21/9501

    Abstract: A flipper for rotating and positioning a photomask in two flip orientations includes a flip unit rotatably held in a base. The flip unit includes a flip frame in which clamps are preferably spring loaded guided such that the clamps are oppositely and laterally displaceable between engaged positions and parking positions. A stepper motor rotates the flip unit between two flip orientations and positions the flip unit such that opposite inspection sides of the work piece are alternately oriented with respect to a single inspection direction. The flipper may be placed on or adjacent to a stage system of an inspection device. A robotically actuated effector may access the flipper for loading and unloading the work piece. In combination with an effector operating without lift motion, the clamps may feature wedge lift faces to lift the work piece off the effector during their actuation into engaged position.

    Abstract translation: 用于以两个翻转取向旋转和定位光掩模的导板包括可旋转地保持在基部中的翻转单元。 翻转单元包括翻转框架,其中夹具优选地被弹簧加载地引导,使得夹具在接合位置和停车位置之间相对地和横向地移位。 步进电机使翻盖单元在两个翻转方向之间旋转,并使翻转单元定位,使得工件的相对的检查侧相对于单个检查方向交替取向。 导板可以放置在检查装置的平台系统上或邻近检查装置的平台系统上。 机器人致动的执行器可以进入导板以装载和卸载工件。 与没有提升运动的效应器组合,夹具可以具有楔形提升面,以在其致动到接合位置期间将工件离开效应器提升。

    Disc clamping device for multiple standard discs

    公开(公告)号:US20060017915A1

    公开(公告)日:2006-01-26

    申请号:US10792655

    申请日:2004-03-03

    CPC classification number: G11B17/028 G11B17/0282

    Abstract: A vacuum assisted disc clamping device provides a number of fixture rings preferably concentrically stacked on a fixture body that is moveable in fixture ring stacking direction and actuated by a wedge drive to compensate for varying fixture levels associated with the individual fixture rings and disc standards. Each fixture ring includes a planar flange with a vacuum groove and a central conical portion that rises above the planar flange. The conical portion is defined with a diameter and cone angle such that a disc of corresponding dimensional standard may be readily placed on the fitting fixture ring with the disc bottom being sucked onto the planar flange while the disc hole centers on the conical portion.

    SHOE PROTECTOR
    10.
    发明申请

    公开(公告)号:US20250134201A1

    公开(公告)日:2025-05-01

    申请号:US18498704

    申请日:2023-10-31

    Applicant: Daniel Tran

    Inventor: Daniel Tran

    Abstract: A shoe protector that is configured to be releasably secured to a shoe wherein the present invention includes a deployable portion that provides coverage of the top of the shoe in order to provide protection thereof. The present invention includes a storage member wherein the storage member is configured to be releasably secured to the top of the tongue of the shoe. The storage member includes a compartment having an interior volume configured to retain the body in its first position. The body of the present invention is configured to be deployed to its second position wherein the body substantially covers the top of the shoe. The body includes a perimeter edge defining the shape thereof. The perimeter edge has integrally formed therein weight members. The weight members are elongated in shaped and are operable to maintain the body in its second position.

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