公开(公告)号：US20210347004A1

公开(公告)日：2021-11-11

申请号：US17242886

申请日：2021-04-28

Applicant: EBARA CORPORATION

Inventor： Shuji UOZUMI ,  Toru MARUYAMA

IPC: B24B37/015

Abstract: A pad-temperature regulating device is disclosed, which can improve a responsiveness of a control for a surface temperature of a polishing pad and regulate the surface temperature of the polishing pad without causing defects, such as scratches, on the substrate. The pad-temperature regulating apparatus includes: a heat exchanger disposed above the polishing pad, whose temperature is maintained at a predetermined temperature; a pad-temperature measuring device configured to measure the surface temperature of the polishing pad; a distance sensor configured to measure a separation distance between the polishing pad and the heat exchanger; an elevating mechanism for moving the heat exchanger vertically with respect to the polishing pad; and a controller configured to control operation of the elevating mechanism based on measured values of the pad-temperature measuring device.

公开(公告)号：US20230356267A1

公开(公告)日：2023-11-09

申请号：US18351911

申请日：2023-07-13

Applicant: Ebara Corporation

Inventor： Shuji UOZUMI ,  Toru MARUYAMA ,  Yasuyuki MOTOSHIMA

IPC: B08B3/04 ,  B08B1/00 ,  H01L21/67 ,  B08B1/04

CPC classification number: B08B3/04 ,  B08B1/007 ,  H01L21/67046 ,  H01L21/67051 ,  B08B1/04 ,  B24B37/345

Abstract: In one embodiment of the present invention, a cleaning member 90 is attached to the surface of a cleaning member attaching part 10. The cleaning member attaching part 10 has a main body 20, a cleaning liquid introduction part 30 extending inside the main body 20, and a plurality of cleaning liquid supply holes 40 communicating with the cleaning liquid introduction part 30. The cleaning liquid introduction part 30 is configured such that cleaning liquid flows in from a first end part 11 side, and an area proportion of the cleaning liquid supply holes 40 in a second region located on a second end part 12 side opposite to the first end part 11 to a surface of the main body 20 is larger than the area proportion of the cleaning liquid supply holes 40 in a first region located on the first end part 11 side to the surface of the main body 20.

公开(公告)号：US20200276619A1

公开(公告)日：2020-09-03

申请号：US16750859

申请日：2020-01-23

Applicant: Ebara Corporation

Inventor： Shuji UOZUMI ,  Toru MARUYAMA ,  Yasuyuki MOTOSHIMA

IPC: B08B3/04 ,  B08B1/00 ,  B08B1/04 ,  H01L21/67

Abstract: In one embodiment of the present invention, a cleaning member 90 is attached to the surface of a cleaning member attaching part 10. The cleaning member attaching part 10 has a main body 20, a cleaning liquid introduction part 30 extending inside the main body 20, and a plurality of cleaning liquid supply holes 40 communicating with the cleaning liquid introduction part 30. The cleaning liquid introduction part 30 is configured such that cleaning liquid flows in from a first end part 11 side, and an area proportion of the cleaning liquid supply holes 40 in a second region located on a second end part 12 side opposite to the first end part 11 to a surface of the main body 20 is larger than the area proportion of the cleaning liquid supply holes 40 in a first region located on the first end part 11 side to the surface of the main body 20.