公开(公告)号：US11512409B2

公开(公告)日：2022-11-29

申请号：US16642183

申请日：2017-08-30

Applicant: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE

Inventor： Niels Quack ,  Adrien Toros ,  Marcell Kiss ,  Teodoro Graziosi ,  Pascal Gallo

IPC: C30B29/66 ,  B81C1/00 ,  C30B29/04 ,  C30B33/12

Abstract: The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: —providing a single crystalline diamond substrate or layer; —providing a first adhesion layer on the substrate or layer; —providing a second adhesion layer on the first adhesion layer: —providing a mask layer on the second adhesion layer; —forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and—etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.