公开(公告)号：US20180143219A1

公开(公告)日：2018-05-24

申请号：US15805232

申请日：2017-11-07

Applicant: EM Microelectronic-Marin SA

Inventor： Sylvain GROSJEAN ,  Yonghong TAO ,  Jean-Michel DAGA

IPC: G01P15/125 ,  G01P15/18 ,  G01P21/00

Abstract: The present invention concerns a capacitive accelerometer for measuring an acceleration value. The accelerometer comprises: a first electrode; a second electrode; a third, mobile electrode arranged between the first and second electrodes, and forming with the first electrode a first capacitor with a first capacitance value, and with the second electrode a second capacitor with a second capacitance value, the third electrode being arranged to be displaced when the capacitive accelerometer is subject to acceleration thereby arranged to generate a capacitance difference value between the first and second capacitances transformable to electrical charges; a first voltage source and a second voltage source for selectively applying a first voltage value to the first electrode, a second voltage value to the second electrode and a third voltage value to the third electrode, and arranged to generate electrostatic forces acting on the third electrode. The first, second and/or third voltage values are arranged to be applied during electrical charge transfers for collecting the electrical charges in order to measure the acceleration. The accelerometer comprises electrostatic force compensation means for compensating missing electrostatic forces owing to a modified charge transfer rate, the amount of compensation being dependent on the modified charge transfer rate.