公开(公告)号：US20230193003A1

公开(公告)日：2023-06-22

申请号：US18084213

申请日：2022-12-19

Applicant: ENTEGRIS, INC.

Inventor： Alissa A. Wild

IPC: C08L23/08 ,  C08K3/04 ,  B82Y30/00

CPC classification number: C08L23/0823 ,  C08K3/041 ,  B82Y30/00 ,  C08K2201/011 ,  C08L2207/04

Abstract: A microenvironment including a shell structure, the shell structure configured to hold semiconductor wafers, wherein the microenvironment includes a blend of cyclo olefin copolymer and one or more polyolefin polymers. The blend may further include a conductive material, such as carbon nanotubes to enhance conductivity of the blend. The blend may be free of impact agents, mold release agents, and plasticizers.