公开(公告)号：US20220111337A1

公开(公告)日：2022-04-14

申请号：US17491700

申请日：2021-10-01

Applicant: Entegris, Inc.

Inventor： James HAMZIK ,  Siddarth SAMPATH ,  Justin BREWSTER ,  Ashutosh Shrikant BHABHE

IPC: B01D69/12 ,  B01D71/26 ,  C02F1/44 ,  C02F1/42 ,  B01D67/00

Abstract: Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.

公开(公告)号：US20210394169A1

公开(公告)日：2021-12-23

申请号：US17350970

申请日：2021-06-17

Applicant: ENTEGRIS, INC.

Inventor： Maybelle WOO ,  Jad A. JABER ,  Saksatha LY ,  Jeffrey E. TOWNLEY ,  James HAMZIK ,  Justin BREWSTER

IPC: B01J47/014 ,  C08J5/22 ,  C08F255/02 ,  B01D39/16 ,  B01J47/12

Abstract: Described are ion-exchange membranes that include a porous polymeric membrane and imidazole ion-exchange groups at surfaces of the membrane; ion-exchange membranes and filters that contain the ion-exchange membranes; and methods of using the ion-exchange membranes and filters for separating charged biological molecule from a liquid.

公开(公告)号：US20200254398A1

公开(公告)日：2020-08-13

申请号：US16779181

申请日：2020-01-31

Applicant: ENTEGRIS, INC.

Inventor： James HAMZIK ,  Jad A. JABER ,  Justin BREWSTER ,  Nicholas J. FILIPANCIC

IPC: B01D71/82 ,  B01D71/36 ,  B01D69/12 ,  C02F1/44 ,  B01J20/26 ,  B01J20/30 ,  C09K13/06 ,  B01J20/28 ,  H01L21/306

Abstract: Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

公开(公告)号：US20220105476A1

公开(公告)日：2022-04-07

申请号：US17488897

申请日：2021-09-29

Applicant: Entegris, Inc.

Inventor： James HAMZIK ,  Justin BREWSTER ,  Siddarth SAMPATH ,  Jad Ali JABER ,  Aabid A. MIR

IPC: B01D71/26

Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

公开(公告)号：US20210260537A1

公开(公告)日：2021-08-26

申请号：US17184273

申请日：2021-02-24

Applicant: ENTEGRIS, INC.

Inventor： James HAMZIK ,  Jad A. JABER ,  Nicholas J. FILIPANCIC ,  Justin BREWSTER

IPC: B01D71/58 ,  B01D71/26 ,  B01D71/36 ,  B01D69/12 ,  C02F1/44 ,  C08F259/08 ,  C08F255/02 ,  C07C229/16

Abstract: Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.