公开(公告)号：US20210079914A1

公开(公告)日：2021-03-18

申请号：US16954466

申请日：2019-04-04

Applicant: Edwards Limited

Inventor： Phillip North ,  Ian Olsen

IPC: F04C25/02 ,  F04C18/12 ,  F04C18/16 ,  F04C29/12 ,  F04C23/00

Abstract: A multi-stage positive displacement vacuum pump and a method of differentially pumping multiple vacuum chambers using such a pump is disclosed. The pump comprises a housing for housing at least one rotor mounted for rotation on a corresponding at least one shaft and for pumping gas through the multiple stages for output through an exhaust. The housing comprises a first inlet configured to admit gas to an inlet stage of said vacuum pump, and a further inlet configured to admit gas to an intermediate stage of said vacuum pump. The pump is configured such that gas admitted through each of the first and further inlets is pumped together as a combined gas flow by at least one stage of said vacuum pump downstream of said intermediate stage.

公开(公告)号：US11326604B2

公开(公告)日：2022-05-10

申请号：US16954466

申请日：2019-04-04

Applicant: Edwards Limited

Inventor： Phillip North ,  Ian Olsen

IPC: F04C25/02 ,  F04C18/12 ,  F04C23/00 ,  F04C29/12 ,  F04C18/16

Abstract: A multi-stage positive displacement vacuum pump and a method of differentially pumping multiple vacuum chambers using such a pump is disclosed. The pump comprises a housing for housing at least one rotor mounted for rotation on a corresponding at least one shaft and for pumping gas through the multiple stages for output through an exhaust. The housing comprises a first inlet configured to admit gas to an inlet stage of said vacuum pump, and a further inlet configured to admit gas to an intermediate stage of said vacuum pump. The pump is configured such that gas admitted through each of the first and further inlets is pumped together as a combined gas flow by at least one stage of said vacuum pump downstream of said intermediate stage.

公开(公告)号：US20180163732A1

公开(公告)日：2018-06-14

申请号：US15578485

申请日：2016-05-16

Applicant: Edwards Limited

Inventor： Andrew Cobbett ,  Stephen Williams ,  Ian Olsen

IPC: F04D19/04 ,  F04D25/06 ,  F04D25/16 ,  F04D29/52

CPC classification number: F04D19/046 ,  F04D19/042 ,  F04D19/048 ,  F04D25/06 ,  F04D25/16 ,  F04D29/522

Abstract: An improved split flow vacuum pump is provided with at least two of compound pumps housed in a common housing comprising first, second, third and fourth inlets for receiving gas from a respective first to fourth chamber; said pumps are arranged such that their rotational axis are angled relative to each other in the housing, preferably perpendicular to each other.