PROCESS AND SYSTEM FOR PURIFICATION OF CITRIC ACID

    公开(公告)号:US20230174450A1

    公开(公告)日:2023-06-08

    申请号:US17924264

    申请日:2020-06-08

    Applicant: ENTEGRIS, INC.

    CPC classification number: C07C51/42 B01D37/04 B01D61/00 B01D2313/44

    Abstract: Citric acid is purified to remove metal ions through a two-step filtration process. A first filter is used to perform a first filtration, then a second filter is used to perform a second filtration on citric acid solution that has been subject to the first filtration. The first and second filters can include the same filter membrane material. The filter used as the first filter can be a relatively dirtier, more loaded filter compared to the filter used as the second filter. The first filtration can be performed over four hours of recirculating the citric acid solution through the first filter, and the second filtration can be performed over approximately two and one half hours of recirculating the citric acid solution through the second filter. Such a purification process can remove calcium and magnesium ions to render citric acid suitable as a cleaning solution in semiconductor processing.

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