公开(公告)号：US06788175B1

公开(公告)日：2004-09-07

申请号：US09972033

申请日：2001-10-04

Applicant: Eric M. Prophet

Inventor： Eric M. Prophet

IPC: H01H5122

CPC classification number: B81B3/0078 ,  B81B2203/0307 ,  H01G5/16 ,  H01H59/0009

Abstract: The present invention provides an anchor system for securing a MEMS device to a substrate comprising multiple anchors. A MEMS structure, built in accordance with the one embodiment of the invention, comprises a flexible beam suspended over a substrate and a base attached to each end of the beam. Each base is supported above the substrate by multiple anchors attached to the surface of the substrate. Each anchor further comprises anchor legs along its sides that support the base off of the substrate. In one embodiment, the anchors of each base are located away from the interface between the beam and the base. In another embodiment, the lengths of the anchor legs of the anchors are made longer along a direction of good side-wall step coverage than along a direction of poor side-wall step coverage.

Abstract translation: 本发明提供一种用于将MEMS装置固定到包括多个锚固件的基板的锚定系统。 根据本发明的一个实施例构建的MEMS结构包括悬挂在基板上的柔性梁和附接到梁的每个端部的基座。 每个基底通过附接到基底表面的多个锚固件支撑在基底上。 每个锚还包括沿其侧面的锚腿，其支撑基底离开基底。 在一个实施例中，每个基座的锚定件远离梁和基座之间的界面。 在另一个实施例中，沿着良好的侧壁台阶覆盖的方向使得锚的锚腿的长度比沿着差的侧壁台阶覆盖的方向更长。

公开(公告)号：US20100073107A1

公开(公告)日：2010-03-25

申请号：US12410976

申请日：2009-03-25

Applicant: Eric M. Prophet ,  Balam A. Willemsen

Inventor： Eric M. Prophet ,  Balam A. Willemsen

IPC: H01P1/203

CPC classification number: H01P7/082 ,  H01P1/20381

Abstract: A filter comprises a substrate, and one or more resonator structures formed on a planar side of the substrate. Each of the one or more resonator structures has a resonant frequency and comprises a folded transmission line that is patterned to form a plurality of adjacent line segments and a plurality of gaps disposed between the adjacent line segments. The ratio of a sum of an average width of the adjacent lines and an average width of the gaps to a thickness of the substrate is equal to or less than 0.50. The filter further comprises an input terminal coupled to one end of the one or more resonator structures, and an output terminal connected to another end of the one or more resonator structures.

Abstract translation: 滤光器包括衬底和形成在衬底的平面侧上的一个或多个谐振器结构。 所述一个或多个谐振器结构中的每一个具有谐振频率，并且包括折叠的传输线，其被图案化以形成多个相邻的线段和设置在相邻线段之间的多个间隙。 相邻线的平均宽度与间隙的平均宽度之和与基板的厚度的比等于或小于0.50。 滤波器还包括耦合到一个或多个谐振器结构的一端的输入端和连接到一个或多个谐振器结构的另一端的输出端。

公开(公告)号：US07894867B2

公开(公告)日：2011-02-22

申请号：US12118533

申请日：2008-05-09

Applicant: George L. Matthaei ,  Balam A. Willemsen ,  Eric M. Prophet ,  Genichi Tsuzuki

Inventor： George L. Matthaei ,  Balam A. Willemsen ,  Eric M. Prophet ,  Genichi Tsuzuki

IPC: H01P1/203 ,  H01B12/02

CPC classification number: H01P1/20354

Abstract: A narrowband filter comprises an input terminal, an output terminal, and an array of basic resonator structures coupled between the terminals to form a single resonator having a resonant frequency. The resonator array may be arranged in a plurality of columns of basic resonator structures, with each column of basic resonator structures having at least two basic resonator structures. The basic resonator structures in each column may be coupled between the terminals in parallel or in cascade. Two or more resonator arrays may be coupled to generate multi-resonator filter functions.

Abstract translation: 窄带滤波器包括输入端子，输出端子和耦合在端子之间的基本谐振器结构的阵列，以形成具有谐振频率的单个谐振器。 谐振器阵列可以布置在多列基本谐振器结构中，每列基本谐振器结构具有至少两个基本谐振器结构。 每列中的基本谐振器结构可以并联或级联地耦合在端子之间。 可以耦合两个或更多个谐振器阵列以产生多谐振器滤波器功能。

公开(公告)号：US20080278262A1

公开(公告)日：2008-11-13

申请号：US12118533

申请日：2008-05-09

Applicant: George L. Matthaei ,  Balam A. Willemsen ,  Eric M. Prophet ,  Genichi Tsuzuki

Inventor： George L. Matthaei ,  Balam A. Willemsen ,  Eric M. Prophet ,  Genichi Tsuzuki

IPC: H03H7/01

CPC classification number: H01P1/20354

Abstract: A narrowband filter comprises an input terminal, an output terminal, and an array of basic resonator structures coupled between the terminals to form a single resonator having a resonant frequency. The resonator array may be arranged in a plurality of columns of basic resonator structures, with each column of basic resonator structures having at least two basic resonator structures. The basic resonator structures in each column may be coupled between the terminals in parallel or in cascade. Two or more resonator arrays may be coupled to generate multi-resonator filter functions.

Abstract translation: 窄带滤波器包括输入端子，输出端子和耦合在端子之间的基本谐振器结构的阵列，以形成具有谐振频率的单个谐振器。 谐振器阵列可以布置在多列基本谐振器结构中，每列基本谐振器结构具有至少两个基本谐振器结构。 每列中的基本谐振器结构可以并联或级联地耦合在端子之间。 可以耦合两个或更多个谐振器阵列以产生多谐振器滤波器功能。

公开(公告)号：US06924966B2

公开(公告)日：2005-08-02

申请号：US10159977

申请日：2002-05-29

Applicant: Eric M. Prophet

Inventor： Eric M. Prophet

IPC: B81B3/00 ,  H01H1/00 ,  H01H1/26 ,  H01H50/00 ,  H01H50/32 ,  H01H50/60 ,  H01H51/10 ,  H01H57/00 ,  H01H59/00 ,  H01H61/00 ,  H01H47/00

CPC classification number: H01H1/0036 ,  H01H50/005 ,  H01H2001/0042 ,  H01H2057/006

Abstract: A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a leaf spring and cantilever that extend from the flexible portion of the torsion member. The switching assembly further comprises a first anchoring member mounting the torsion member to the stable structure, and a second anchoring member mounting the leaf spring to the stable structure. In this manner, the leaf spring has a flexible portion between the first and second anchors that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions. The leaf spring can exhibit a first stable geometry (e.g., a convex geometry) when flexed in one of the opposite directions, and a second stable geometry (e.g., a concave geometry) when flexed in another of the opposite directions. Thus, the switch can be switched between two stable states using a momentary force and can maintain these two stable states without further expenditure of energy.

Abstract translation: 提供了一种包括基板和弹性开关元件的MEMS开关组件。 弹性切换构件包括具有柔性部分的横向扭转构件和从扭转构件的柔性部分延伸的板簧和悬臂。 切换组件还包括将扭转构件安装到稳定结构的第一锚固构件和将板簧安装到稳定结构的第二锚固构件。 以这种方式，板簧在第一和第二锚固件之间具有柔性部分，该柔性部分可以在相反的方向上交替地弯曲，以在相对的相对方向偏转悬臂端。 当在相反方向中的一个方向上弯曲时，板簧可呈现出第一稳定的几何形状（例如，凸形几何形状），以及当在相反方向上的另一方向弯曲时，第二稳定几何形状（例如，凹形几何形状）。 因此，可以使用瞬时力在两个稳定状态之间切换开关，并且可以维持这两个稳定状态，而不需要进一步的能量消耗。

公开(公告)号：US06876046B2

公开(公告)日：2005-04-05

申请号：US10072656

申请日：2002-02-07

Applicant: Eric M. Prophet

Inventor： Eric M. Prophet

IPC: B81B3/00 ,  H01L21/334 ,  H01L29/82 ,  H01L21/00

CPC classification number: B81B3/001 ,  B81C2201/112 ,  H01L29/66181

Abstract: The present invention alleviates stiction between a suspended beam or microstructure and an underlying substrate by providing a patterned passivation layer on the substrate underneath the beam. The passivation layer is patterned to provide a substrate surface that differs substantially from the bottom surface of the beam. The difference between these two surfaces reduces the potential contact area between the beam and the substrate when the beam is pulled down, thereby reducing adhesive forces between the beam and the substrate and reducing the likelihood of stiction. In one embodiment, the passivation layer is patterned to form a substrate surface comprising a plurality of protuberances. In another embodiment, the passivation layer is patterned to form a substrate surface having a mesh pattern.

Abstract translation: 本发明通过在光束下方的衬底上提供图案化的钝化层来减轻悬挂梁或微结构和下层衬底之间的粘结。 钝化层被图案化以提供基本上与梁的底表面不同的衬底表面。 这两个表面之间的差异减小了当光束被拉下时光束和基板之间的潜在接触面积，从而减小光束与基板之间的粘合力，并降低粘结的可能性。 在一个实施例中，钝化层被图案化以形成包括多个突起的衬底表面。 在另一个实施例中，对钝化层进行图案化以形成具有网格图案的衬底表面。