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公开(公告)号：US20250125114A1
公开(公告)日：2025-04-17
申请号：US18485133
申请日：2023-10-11
Applicant: FEI Company
Inventor： Alexandr DOLGOV , Leo VAN HELVERT
IPC: H01J37/06 , H01J37/141
Abstract: A charged particle microscope system, comprising an electron source housing a Wehnelt electrode and a cathode, wherein the electron source may include a dry environment defining a volume between the Wehnelt electrode and the cathode that may be substantially water-free, a beam column including a plurality of electromagnetic lens elements, and a vacuum chamber including a sample holder. An electron beam axis may be defined from the cathode to the sample holder.
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