公开(公告)号：US20190075258A1

公开(公告)日：2019-03-07

申请号：US16180242

申请日：2018-11-05

Applicant: FEI Company

Inventor： Bart Josef Janssen ,  Erik Michiel Franken ,  Maarten Kuijper ,  Lingbo Yu

IPC: H04N5/349 ,  G01T1/24 ,  H04N5/378 ,  G06T3/40 ,  H01L27/146

CPC classification number: H04N5/349 ,  G01T1/247 ,  G06T3/4069 ,  H01L27/14659 ,  H04N5/378

Abstract: When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.