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公开(公告)号：US20230132874A1
公开(公告)日：2023-05-04
申请号：US17584303
申请日：2022-01-25
Applicant: FEI Company
Inventor： Krishna Kanth NEELISETTY , Milos TRENZ , Jindrich VONDRUSKA , Jakub STETINA
IPC: H01J37/18
Abstract: Air sensitive sample may be transferred between charged particle instruments or between charged particle instrument and a glove box using a sample transfer system. The sample transfer system includes a transfer shuttle for receiving a sample carrier and a transfer rod detachable coupled to the transfer shuttle. The transfer rod moves the sample carrier into or out of the transfer shuttle.
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