公开(公告)号：US20190172681A1

公开(公告)日：2019-06-06

申请号：US16173175

申请日：2018-10-29

Applicant: FEI Company

Inventor： Michael James OWEN ,  Ashley DONALDSON

IPC: H01J37/32 ,  H01J37/26 ,  G01N23/223

Abstract: A method of operating a charged particle microscope comprising: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles, and irradiating the specimen with said beam; Using a detector to detect X-ray radiation emanating from the specimen in response to said irradiation, and to produce a spectrum comprising X-ray characteristic peaks on a Bremsstrahlung background, comprising the following additional steps: Using an elemental decomposition algorithm to analyze the characteristic peaks in said spectrum, thereby determining a reference group of major chemical elements contributing to the spectrum; Calculating an average atomic number for said reference group, and using this in a predictive model to generate a calculated Bremsstrahlung profile for the reference group; Fitting said calculated Bremsstrahlung profile to the Bremsstrahlung background in said spectrum, and attributing a discrepancy between the latter and the former to a residual element absent from, or incorrectly quantified in, said reference group.

公开(公告)号：US20220319206A1

公开(公告)日：2022-10-06

申请号：US17707804

申请日：2022-03-29

Applicant: FEI Company

Inventor： Darius Kocár ,  Michael James OWEN

IPC: G06V20/69 ,  G06V10/26 ,  G06V10/143 ,  G01N23/203 ,  G01N23/223 ,  G01N23/2206

Abstract: The invention relates to method and system configured for material analysis and mineralogy. At least one image based on first emission from a sample is provided. First spectra of the sample based on second emissions from the second scan locations of the image are provided. A confidence score is calculated for every first spectrum, and second scan location(s) with confidence score(s) below a threshold value are selected. Second emissions from the selected second scan location(s) are acquired to provide new image and determine new second scan locations within the respective new image.