公开(公告)号：US11328892B2

公开(公告)日：2022-05-10

申请号：US16987172

申请日：2020-08-06

Applicant: FEI Company

Inventor： Erik Rene Kieft ,  Pleun Dona ,  Jasper Frans Mathijs van Rens ,  Wouter Verhoeven ,  Peter Mutsaers ,  Jom Luiten ,  Ond{hacek over (r)}ej Ba{hacek over (c)}o

IPC: H01J37/04 ,  H01J37/26 ,  H01P7/06

Abstract: Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity includes a dielectric insert, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.

公开(公告)号：US20210043410A1

公开(公告)日：2021-02-11

申请号：US16987172

申请日：2020-08-06

Applicant: FEI Company

Inventor： Erik Rene Kieft ,  Pleun Dona ,  Jasper Frans Mathijs van Rens ,  Wouter Verhoeven ,  Peter Mutsaers ,  Jom Luiten ,  Ondrej Baco

IPC: H01J37/04 ,  H01J37/26 ,  H01P7/06

Abstract: Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity includes a dielectric insert, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.