公开(公告)号：US20230204525A1

公开(公告)日：2023-06-29

申请号：US17561497

申请日：2021-12-23

Applicant: FEI Company

Inventor： Libor NOVAK ,  Krishna Kanth NEELISETTY ,  Veronika HAMMEROVA ,  Jan LASKO

IPC: G01N23/2204 ,  G01N23/2273 ,  H01J37/20 ,  G01N23/2251

CPC classification number: G01N23/2204 ,  G01N23/2273 ,  H01J37/20 ,  G01N23/2251

Abstract: A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.