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1.发明授权Apparatus and method for forming a transparent conductive oxide layer over a substrate using a laser 有权使用激光在衬底上形成透明导电氧化物层的装置和方法公开(公告)号：US09065009B2
公开(公告)日：2015-06-23
申请号：US13859137
申请日：2013-04-09
Applicant: FIRST SOLAR, INC.
Inventor： Douglas Dauson , Joseph Kucharczyk , James D. Reed , Thomas W. Shields
IPC: H01L21/00 , H01L31/18 , H01L31/0224 , H01L21/02
CPC classification number: H01L31/1884 , H01L21/02565 , H01L21/02675 , H01L31/022466 , Y02E10/50
Abstract: An apparatus and method for converting an amorphous transparent conductive oxide to a crystalline form with the assistance of irradiation of a laser.
Abstract translation: 借助于激光的照射，将非晶透明导电氧化物转变为结晶形式的装置和方法。
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2.发明申请APPARATUS AND METHOD FOR FORMING A TRANSPARENT CONDUCTIVE OXIDE LAYER OVER A SUBSTRATE USING A LASER 有权使用激光在基板上形成透明导电氧化层的装置和方法公开(公告)号：US20130267060A1
公开(公告)日：2013-10-10
申请号：US13859137
申请日：2013-04-09
Applicant: FIRST SOLAR, INC.
Inventor： Douglas Dauson , Joseph Kucharczyk , James D. Reed , Thomas W. Shields
IPC: H01L31/18
CPC classification number: H01L31/1884 , H01L21/02565 , H01L21/02675 , H01L31/022466 , Y02E10/50
Abstract: An apparatus and method for converting an amorphous transparent conductive oxide to a crystalline form with the assistance of irradiation of a laser.
Abstract translation: 借助于激光的照射，将非晶透明导电氧化物转变为结晶形式的装置和方法。
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