公开(公告)号：US09538629B2

公开(公告)日：2017-01-03

申请号：US14201327

申请日：2014-03-07

Applicant: GIGAPHOTON INC.

Inventor： Takashi Saito ,  Naoyoshi Imachi ,  Osamu Wakabayashi

IPC: H04N9/64 ,  G02B27/64 ,  H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A chamber for an extreme ultraviolet light generation apparatus is a chamber into which droplets are sequentially outputted, and may include an image capturing unit configured to repeatedly capture images of the droplets during an image capturing time set so that images of two adjacent droplets that have been outputted do not overlap.

Abstract translation: 用于极紫外光发生装置的室是依次输出液滴的室，并且可以包括图像捕获单元，其被配置为在设置的图像捕获时间期间反复捕获液滴的图像，使得已经存在两个相邻液滴的图像 输出不重叠。