Micro electro mechanical system sound wave transducer

    公开(公告)号:US12028668B2

    公开(公告)日:2024-07-02

    申请号:US17738015

    申请日:2022-05-06

    CPC classification number: H04R1/083 H04R2201/003 H04R2499/11

    Abstract: A sound wave transducer is provided. The sound wave transducer includes a first board, a spacer layer and a second board over the first board and the spacer layer. The first board includes a carrier, a first substrate layer and a first metal layer. The carrier has a first opening formed in a central region. The first substrate layer is disposed on the carrier and over the first opening. The first metal layer is disposed on the first substrate layer. The spacer layer is disposed on the first board and surrounds the central region. The second board includes a second substrate layer, a second metal layer disposed on the spacer layer, and a plurality of second openings penetrating through the second substrate layer and the second metal layer.

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