公开(公告)号：US20140308108A1

公开(公告)日：2014-10-16

申请号：US13859773

申请日：2013-04-10

Applicant: GLOBALFOUNDRIES INC.

Inventor： William J. FOSNIGHT ,  Ryan J. GALLAGHER ,  Stephen B. MINER

IPC: H01L21/677

CPC classification number: H01L21/67775 ,  H01L21/67379

Abstract: A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.

Abstract translation: 用于分开处理不同尺寸的FOUP的系统包括其上具有用于支撑FOUP的表面的端部执行器。 端部执行器和表面配置为支持不同尺寸的FOUP。 包括用于接合和保持不同尺寸FOUP的FOUP的固定装置或装置，用于在其运送期间在末端执行器上定位和保持每个不同尺寸的FOUP。 架子被配置为接收每个所述不同大小的FOUP。 因此，末端执行器能够运送第一尺寸FOUP或第二较小尺寸的FOUP。