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公开(公告)号：US10818528B2
公开(公告)日：2020-10-27
申请号：US16248220
申请日：2019-01-15
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Abner Bello , Stephanie Waite , William J. Fosnight , Thomas Beeg
IPC: G01J5/00 , H01L21/673 , H01L21/66 , G01N21/55 , G01N21/21 , G01J5/02 , H01L21/67 , G01R31/28 , G01N21/01 , H01L21/677 , G01R27/00 , G01J5/08 , G01B11/06 , G01B11/30
Abstract: Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
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公开(公告)号：US10242895B2
公开(公告)日：2019-03-26
申请号：US15876472
申请日：2018-01-22
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Abner Bello , Stephanie Waite , William J. Fosnight , Thomas Beeg
IPC: G01J5/00 , H01L21/673 , H01L21/66 , G01N21/55 , G01N21/21 , G01J5/02 , G01R27/00 , H01L21/67 , G01J5/08 , H01L21/677
Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
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公开(公告)号：US20190148180A1
公开(公告)日：2019-05-16
申请号：US16248220
申请日：2019-01-15
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Abner Bello , Stephanie Waite , William J. Fosnight , Thomas Beeg
Abstract: Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
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公开(公告)号：US09911634B2
公开(公告)日：2018-03-06
申请号：US15193502
申请日：2016-06-27
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Abner Bello , Stephanie Waite , William J. Fosnight , Thomas Beeg
CPC classification number: G01J5/0096 , G01J5/0007 , G01J5/025 , G01J5/0825 , G01J5/0896 , G01N21/211 , G01N21/55 , G01N2201/06113 , G01N2201/0683 , G01N2201/12 , G01R27/00 , H01L21/67253 , H01L21/6732 , H01L21/67353 , H01L21/67386 , H01L22/12
Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
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