公开(公告)号：US20230384238A1

公开(公告)日：2023-11-30

申请号：US18205108

申请日：2023-06-02

Applicant: GREEN OPTICS CO., LTD.

Inventor： Hyun Il Cho ,  Dong Geun Kim ,  Kyoung Sang Moon ,  Jin Ho Kim ,  Jae Hee Byun

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/0636

Abstract: Disclosed is an optical system for imaging, which enables high resolution. An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, includes a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations, and a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus.

公开(公告)号：US11906443B2

公开(公告)日：2024-02-20

申请号：US18205108

申请日：2023-06-02

Applicant: GREEN OPTICS CO., LTD.

Inventor： Hyun Il Cho ,  Dong Geun Kim ,  Kyoung Sang Moon ,  Jin Ho Kim ,  Jae Hee Byun

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/0636

Abstract: Disclosed is an optical system for imaging, which enables high resolution. An optical system for imaging, which focuses inspection light and monitoring light on an inspection target, includes a dioptric group configured to receive inspection light and monitoring light and to primarily focus the inspection light and the monitoring light on different locations, and a reflection dioptric group configured to reflect and refract the inspection light and the monitoring light that have passed through the dioptric group and to bring the inspection light and the monitoring light into one focus.