公开(公告)号：US20180104779A1

公开(公告)日：2018-04-19

申请号：US15844571

申请日：2017-12-17

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： ZHIJUN YANG ,  Youdun BAI ,  XIN CHEN ,  Chaoran CHEN

IPC: B23Q1/34 ,  H01L21/67 ,  B81C1/00

CPC classification number: B23Q1/34 ,  B23Q1/36 ,  B23Q1/58 ,  B23Q5/28 ,  B23Q2210/002 ,  B81C1/00126 ,  H01L21/67126 ,  H02K41/02

Abstract: The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement “jitter” caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.