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1.发明公开公开(公告)号：US20240295830A1
公开(公告)日：2024-09-05
申请号：US18319510
申请日：2023-05-18
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： YIN-FENG CHAN , LIN-HSIN TU , MING-MO LO
CPC classification number: G03F7/70741 , G03F1/66 , G03F1/84
Abstract: An optical inspection device for a surface of a reticle pod includes a carrier platform having a carrier surface, a light source module, a photographic module, and a control module. The light source module includes first and second light sources for irradiating the carrier surface in first and second directions, respectively. An angle of an included angle between the first direction and the carrier surface is greater than an angle of an included angle between the second direction and the carrier surface. The control module is signally connected to the camera module, first light source, and second light source. The control module controls one of the first light source and second light source to turn on and the other one to turn off. An optical inspection method for a surface of a reticle pod is further provided to operate to inspect a reticle pod efficiently and precisely.
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Patent Agency Ranking
公开(公告)号：US20240295461A1
公开(公告)日：2024-09-05
申请号：US18319512
申请日：2023-05-18
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： YIN-FENG CHAN , LIN-HSIN TU , MING-MO LO
CPC classification number: G01M11/0257 , G01M11/0278 , G06T7/0004 , H04N23/56 , G06T2207/30108
Abstract: An inspection device for a sub-element of a reticle pod comprises a carrier platform, a light source module, a camera module and a control module. The light source module includes a coaxial light source and a height adjustment mechanism. The height adjustment mechanism is connected to at least one of the coaxial light source and the carrier platform. The camera module is connected to the coaxial light source and has a lens facing the carrier platform. The control module is signally connected to the camera module and the height adjustment mechanism. The control module controls the height adjustment mechanism to adjust a relative distance between the coaxial light source and the carrier platform. The inspection device for a sub-element of a reticle pod performs optical inspection on the sub-element of a reticle pod.
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公开(公告)号：US20230149986A1
公开(公告)日：2023-05-18
申请号：US17989709
申请日：2022-11-18
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： MING-MO LO , LIN-HSIN TU
Abstract: A drawer-replaced cleaning apparatus comprises: a box, at least one cleaning module and a lifting power module, the box has an accommodating space and a drawer, the drawer is located in the accommodating space, and may be pulled out from one side of the box, a bottom surface of the drawer has at least one mounting slot, the at least one cleaning module is detachably disposed in the mounting slot, the lifting power module is located in the accommodating space, and disposed below the cleaning module, the lifting power module passes through the mounting slot to push the cleaning module up away from the drawer, and the lifting power module is lowered so that the cleaning module is relocated in the mounting slot. The present disclosure solves the problem that the cleaning module of the prior art is difficult to replace.
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公开(公告)号：US20240192587A1
公开(公告)日：2024-06-13
申请号：US18079899
申请日：2022-12-13
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： YIN-FENG CHAN , LIN-HSIN TU , MING-MO LO
Abstract: A gripping mechanism for inspection of a reticle inner pod includes a quadrilateral frame and fourth gripper units. The four gripper units are respectively disposed at four border strips of the quadrilateral frame and are opposite in pairs. Each gripper unit has a body, a first gripping portion and a second gripper portion. The first and second gripping portions are respectively located on different positions of the body. The first gripping portions form a first gripping plane, and the second gripping portions form a second gripping plane. At least two adjacent gripper units have a power member, which is in power connection with the body so as to adjust a distance between two bodies opposite to each other. The gripping mechanism for the inspection of the reticle inner pod is capable of securely gripping the reticle inner pod during transportation or turning of reticles.
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5.发明公开公开(公告)号：US20240329544A1
公开(公告)日：2024-10-03
申请号：US18321799
申请日：2023-05-23
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： YIN-FENG CHAN , LIN-HSIN TU , MING-MO LO
CPC classification number: G03F7/70741 , G01N21/94 , G03F1/66 , G03F7/70758 , G03F7/7085 , G03F7/70916
Abstract: An inner pod holding device conducive to reducing dust contamination comprises a separator, a plurality of supporters, a first positioning module, and a second positioning module. The separator defines a concealing space and a holding space. The plurality of supporters is disposed in the holding space. The first positioning module includes a first driving member and at least one first positioning member. The first driving member is disposed in the concealing space and configured to move in a first direction. The second positioning module includes a second driving member and at least one second positioning member. The second driving member is disposed in the concealing space and configured to move in a second direction. The first and second positioning members each have a top portion protruding to the holding space. An optical inspection apparatus with the inner pod holding device is further provided.
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6.发明公开公开(公告)号：US20240295504A1
公开(公告)日：2024-09-05
申请号：US18319508
申请日：2023-05-18
Applicant: GUDENG EQUIPMENT CO., LTD.
Inventor： YIN-FENG CHAN , LIN-HSIN TU , MING-MO LO
IPC: G01N21/94
CPC classification number: G01N21/94 , G01N2201/021 , G01N2201/022
Abstract: A high-speed surface inspection system for a reticle pod and method comprises a cabinet, a clamping module, a first inspection device, a second inspection device, and a travel stroke controller. An interior of the cabinet is divided into an automated device area, a first inspection area, and a second inspection area. The travel stroke controller controls the clamping module to reciprocate between the automated device area and the first inspection area so as to transport a first portion of the reticle pod, and controls the clamping module to reciprocate between the automated device area and the second inspection area so as to transport a second portion of the reticle pod. A high-speed surface inspection method for a reticle pod is further provided. The present application solves the issue of an inability for efficient surface inspection of a reticle pod.
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