公开(公告)号：US5253038A

公开(公告)日：1993-10-12

申请号：US607776

申请日：1990-10-22

Applicant: Gijsbertus Bouwhuis ,  Josephus J. M. Braat

Inventor： Gijsbertus Bouwhuis ,  Josephus J. M. Braat

IPC: G01B11/26 ,  G01M11/02 ,  G02B6/32 ,  G02B27/62 ,  G01B9/02

CPC classification number: G01B11/26 ,  G01M11/0221 ,  G02B27/62 ,  G02B6/32

Abstract: A device for detecting a centering error of a rotationally symmetrical surface (0.sub.1, 0.sub.2) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centering error detection is described. Two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) at angles of approximately 90.degree. are directed onto the object and the variation in the phase difference caused by the centering error (.epsilon.) between the two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) reflected by the surface is determined.

Abstract translation: 描述了一种用于检测物体（0）相对于旋转轴线（AR）的旋转对称表面（01,02）的定心误差的装置，该旋转轴线（AR）围绕对象被旋转的轴线用于定心误差检测。 大约90度角的两束（b1，b2; b3，b4）被引导到物体上，并且由两束（b1，b2; b3，b4）之间的对中误差（ε）引起的相位差的变化， 由表面反射确定。

公开(公告)号：US4084185A

公开(公告)日：1978-04-11

申请号：US663268

申请日：1976-03-03

Applicant: Hendrik de Lang ,  Gijsbertus Bouwhuis

Inventor： Hendrik de Lang ,  Gijsbertus Bouwhuis

IPC: G11B7/005 ,  G11B7/013 ,  G11B7/09 ,  H04N5/76 ,  G11B23/00

CPC classification number: G11B7/24085 ,  G11B7/005 ,  G11B7/0938

Abstract: A record carrier is described which is provided with an optically readable structure of trackwise arranged areas alternating with intermediate areas. Areas of at least two different types are provided. As a result, a high information density can be achieved. The different types of areas may also be used for centering a read beam relative to a track and for focussing the beam onto the track.

公开(公告)号：US4006293A

公开(公告)日：1977-02-01

申请号：US568727

申请日：1975-04-16

Applicant: Gijsbertus Bouwhuis ,  Josephus Johannes Maria Braat ,  Peter Ferdinand Greve ,  Kornelis Antonie Immink

Inventor： Gijsbertus Bouwhuis ,  Josephus Johannes Maria Braat ,  Peter Ferdinand Greve ,  Kornelis Antonie Immink

IPC: H04N5/85 ,  G02B7/36 ,  G11B7/005 ,  G11B7/09 ,  G11B7/13 ,  H04N5/76 ,  G11B7/12

CPC classification number: G11B7/13 ,  G11B7/005 ,  G11B7/0917

Abstract: An apparatus is described for reading a flat record carrier on which information is stored in an optically readable track-shaped information structure. By the arrangement in the far field of the information structure and at one side of a plane which is formed by the optical axis of an objective system which is used for reading and a line parallel to the center line of the track portion to be read, of a radiation-sensitive detection system which consists of at least two detectors in approximately the position .beta./2, .beta. being the angle at which a first-order beam is diffracted in the lateral direction of the tracks, centering and focussing errors can be detected without the use of auxiliary beams and additional optical elements.

Abstract translation: 描述了一种用于读取以光学可读的轨道形信息结构存储信息的平面记录载体的装置。 通过在信息结构的远场中和在由用于读取的物镜系统的光轴和平行于要读取的轨道部分的中心线的直线形成的平面的一侧， 由大约β/ 2位置的至少两个检测器组成的辐射敏感检测系统，β是在轨道的横向上衍射一阶光束的角度，可以检测定心和聚焦误差 而不使用辅助光束和附加的光学元件。

公开(公告)号：US4251160A

公开(公告)日：1981-02-17

申请号：US924351

申请日：1978-07-13

Applicant: Gijsbertus Bouwhuis ,  Theodorus F. Lamboo

Inventor： Gijsbertus Bouwhuis ,  Theodorus F. Lamboo

IPC: H01L21/30 ,  G02B27/18 ,  G03F9/00 ,  H01L21/027 ,  G01B11/26

CPC classification number: G03F9/7076 ,  G02B27/18 ,  G03F9/7049

Abstract: A method and arrangement for aligning a mask comprising a mask-pattern relative to a substrate when the mask-pattern is repeatedly and directly imaged on the substrate, gratings in the mask and gratings on the substrate (phase gratings) being employed as alignment references. The gratings in the mask are located outside the mask pattern and the phase gratings are located on the substrate outside the area where the mask-pattern is imaged. The substrate (phase) gratings are imaged on one of the mask gratings with a projection system which is also used for projecting the mask-pattern on the substrate. The image of the gratings on the grating in the mask is adjusted. Thus, a very accurate alignment can be achieved.

Abstract translation: 当掩模图案被重复地直接成像在基板上时，掩模中的光栅和基板上的光栅（相位光栅）被用作对准基准，用于对准包括掩模图案的掩模的方法和装置。 掩模中的光栅位于掩模图案之外，并且相位光栅位于掩模图案被成像的区域之外的基板上。 衬底（相位）光栅通过投影系统在掩模光栅中的一个上成像，该投影系统也用于将掩模图案投影到衬底上。 调整掩模上光栅上的光栅的图像。 因此，可以实现非常精确的对准。

公开(公告)号：US4242579A

公开(公告)日：1980-12-30

申请号：US925230

申请日：1978-07-17

Applicant: Gijsbertus Bouwhuis

Inventor： Gijsbertus Bouwhuis

IPC: G11B7/135 ,  G02B27/42 ,  G11B7/005 ,  G11B7/08 ,  G01J1/20

CPC classification number: G02B27/4238 ,  G02B27/42 ,  G11B7/005 ,  G11B7/08

Abstract: An apparatus is described for the pointwise scanning of an information surface. By arranging an observation objective system asymmetrically relative to a zero-order subbeam of the radiation coming from the information surface, and by utilizing a detector whose dimension in the scanning direction is small, the resolution can be increased.

Abstract translation: 描述了用于信息表面的逐点扫描的装置。 通过相对于来自信息表面的辐射的零级子束不对称地布置观察目标系统，并且通过利用扫描方向尺寸小的检测器，可以提高分辨率。

公开(公告)号：US4118734A

公开(公告)日：1978-10-03

申请号：US737321

申请日：1976-10-29

Applicant: Gijsbertus Bouwhuis ,  Josephus Johannes Maria Braat ,  Bernardus Antonius Johannus Jacobs

Inventor： Gijsbertus Bouwhuis ,  Josephus Johannes Maria Braat ,  Bernardus Antonius Johannus Jacobs

IPC: G11B7/0045 ,  G11B7/013 ,  G11B7/135 ,  H04N5/76

CPC classification number: G11B7/24085 ,  G11B7/0045 ,  G11B2007/13727

Abstract: A disc-shaped record carrier is described on which information is recorded in an optical structure of trackwise arranged areas and intermediate areas. By adapting the average dimensions of the areas to the average spatial frequencies on the record carrier a read signal can be obtained of sufficient modulation depth and minimal distortion. This is accomplished by increasing the track width with decreasing radius of the record carrier.

Abstract translation: 描述了一种盘形记录载体，其中信息被记录在轨道布置区域和中间区域的光学结构中。 通过使区域的平均尺寸适应于记录载体上的平均空间频率，可以获得足够的调制深度和最小失真的读取信号。 这是通过增加记录载体半径减小的轨迹宽度来实现的。

公开(公告)号：US4034403A

公开(公告)日：1977-07-05

申请号：US501676

申请日：1974-08-29

Applicant: Klaas Compaan ,  Gijsbertus Bouwhuis

Inventor： Klaas Compaan ,  Gijsbertus Bouwhuis

IPC: G11B7/09 ,  G11B7/12 ,  G11B7/16 ,  G11B7/24

CPC classification number: G11B7/09 ,  G11B7/12

Abstract: An apparatus is described for reading, by means of a beam of radiation, a disk-shaped information carrier which contains spirally arranged video and/or audio signals coded in optical form, which apparatus comprises a source of radiation and a radiation-sensitive signal detector cell, the information carrier being disposed in the radiation path between this source and this detector. By providing at least one grating, consisting of radiation-transmitting and radiation-absorbing stripes and on which an image of part of the grating-shaped structure of the information track in the vicinity of the portion of this track to be read may be formed, and a radiation-sensitive detection system, an accurate indication of axial and radial displacements of the optical imaging system relative to the information carrier can be obtained.

Abstract translation: 描述了一种用于通过辐射束读取包含以光学形式编码的螺旋排列的视频和/或音频信号的盘形信息载体的装置，该装置包括辐射源和辐射敏感信号检测器 信息载体被布置在该源和该检测器之间的辐射路径中。 通过提供由辐射透射和辐射吸收条构成的至少一个光栅，并且可以在其上形成要读取的该轨道的部分附近的信息轨道的格栅结构的一部分的图像， 和辐射敏感检测系统，可以获得光学成像系统相对于信息载体的轴向和径向位移的精确指示。

公开(公告)号：US5153873A

公开(公告)日：1992-10-06

申请号：US333149

申请日：1989-04-03

Applicant: Johannes H. M. Spruit ,  Gijsbertus Bouwhuis ,  Antonius H. M. Holtslag ,  Cornelis M. J. Van Uijen

Inventor： Johannes H. M. Spruit ,  Gijsbertus Bouwhuis ,  Antonius H. M. Holtslag ,  Cornelis M. J. Van Uijen

IPC: G11B11/10 ,  G11B7/00 ,  G11B7/004 ,  G11B7/12 ,  G11B7/24 ,  G11B7/26 ,  G11B11/105

CPC classification number: G11B11/10593 ,  G11B11/10515 ,  G11B11/10578 ,  G11B7/004 ,  G11B7/12 ,  G11B7/24 ,  G11B7/261

Abstract: Recording and/or reading of information on an optical record carrier is effected by scanning such record carrier with a radiation beam which is focussed by an objective lens into a scanning spot of a size which is diffraction-limited by the aperture of the objective lens. The effective size of the scanning spot is considerably reduced by including a layer of non-linear optical material in the record carrier, such material having an optical characteristic which changes with changes in intensity of the radiation incident thereon. The read/write resolution of information on the record carrier is thereby substantially increased.

公开(公告)号：US4571616A

公开(公告)日：1986-02-18

申请号：US508221

申请日：1983-06-27

Applicant: Jan Haisma ,  Gijsbertus Bouwhuis

Inventor： Jan Haisma ,  Gijsbertus Bouwhuis

IPC: H04N13/04 ,  H04N13/00 ,  H04N9/60

CPC classification number: H04N13/0409 ,  H04N13/0404

Abstract: In a device for displaying three-dimensional pictures, N (with N=2, 3, 4 . . . ) recorded images corresponding to different spatial observation positions are displayed on one or more intermediate display screens (3, 4, 5, 82, 83, 84). The device comprises a viewing screen (6) having lens elements (20, 30) via which corresponding picture segments of the recorded images are displayed. An optical coupling (8, 44) having a plurality of light conductors (8) exists between the viewing screen and the intermediate display screen(s). The light conductors unambiguously associate groups of N corresponding picture segments with lens elements of the viewing screen. By means of the device, three-dimensional pictures can be observed without further auxiliary means for the viewer.

Abstract translation: 在用于显示三维图像的装置中，在一个或多个中间显示屏幕（3,4,5,52,84）上显示与不同的空间观察位置对应的N（N = 2,3,4 ...）记录图像， 83，84）。 该装置包括具有透镜元件（20,30）的观察屏（6），通过该观察屏显示所记录图像的对应图像段。 在观看屏幕和中间显示屏幕之间存在具有多个光导体（8）的光耦合器（8,44）。 光导体明确地将N个相应图片段的组与观看屏幕的透镜元件相关联。 通过该装置，可以观察三维图像，而无需为观看者提供进一步的辅助装置。

公开(公告)号：US4379230A

公开(公告)日：1983-04-05

申请号：US184561

申请日：1980-09-05

Applicant: Gijsbertus Bouwhuis ,  Hendrik De Lang ,  Nicolaas H. Dekkers

Inventor： Gijsbertus Bouwhuis ,  Hendrik De Lang ,  Nicolaas H. Dekkers

IPC: H01J37/153 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  G01N23/00

CPC classification number: H01J37/21 ,  H01J37/153 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24578 ,  H01J2237/24592

Abstract: In a scanning electron microscope, a periodic structure in the object plane is used for the detection of the focus condition of a spot-focussed electron beam scanning an object in order to correct defocusing and astigmatism in the scanning electron beam spot. To achieve this the detector comprises a plurality of individual elements which can be pair-wise read and an electronic circuit for forming a control signal for controlling the excitation of a spot-forming lens and a stigmator, respectively, from signals representing movement of the electron interference pattern at the detector, relative to the object scan, due to an out of focus condition. The signals are derived from corresponding pairs of detector elements which are situated at a fixed distance from each other in order to correct the focus and compensate for the astigmatism in the electron beam respectively. In the case of astimatism, signals from at least two pairs of detector elements spaced in directions at right-angles to one another, are used.

Abstract translation: 在扫描电子显微镜中，物镜中的周期性结构用于检测点聚焦电子束扫描物体的聚焦条件，以便校正扫描电子束斑中的散焦和像散。 为了实现这一点，检测器包括可以被成对读取的多个单独元件和用于形成控制信号的电子电路，用于分别由表示电子的移动的信号控制点形成透镜和点状器的激发 相对于物体扫描，检测器处的​​干涉图案由于焦距不足而导致。 这些信号是从对应的检测器元件对得出的，这些检测器元件分别位于彼此固定的距离处，以便校正聚焦并补偿电子束中的像散。 在这种情况下，使用来自至少两对检测器元件的信号，该检测器元件以彼此成直角的方向间隔开。