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公开(公告)号:US10257921B1
公开(公告)日:2019-04-09
申请号:US15951717
申请日:2018-04-12
Applicant: Google LLC
Inventor: Richard Roy , Pierre-luc Cantin , Teckgyu Kang , Woon Seong Kwon
Abstract: Embedded air gap transmission lines and methods of fabrication are provided. An apparatus having an air gap transmission line can include a first conductive plane, a core dielectric layer having a bottom surface in contact with the first conductive plane, a conductor having a bottom surface in contact with a top surface of the core dielectric layer, and a second conductive plane positioned over, and spaced apart from, a top surface of the conductor such that a gap separates the conductor from the second conductive plane. The top surface of the conductor is separated from the bottom surface of the second conductive plane by a first distance measured along an axis normal to the first conductive plane, and the bottom surface of the conductor is separated from the first conductive plane by a second distance greater than the first distance measured along the axis.