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公开(公告)号:US20240172475A1
公开(公告)日:2024-05-23
申请号:US18381169
申请日:2023-10-17
Applicant: HANNSTAR DISPLAY CORPORATION
Inventor: Li-Fang Chiu , Ching-Chieh Lee , Chien-Hung Wu
CPC classification number: H10K59/1201 , C09K13/04 , H10K71/231
Abstract: The invention discloses an etching solution and a manufacturing method of a display panel. The method includes following steps: providing a first substrate; forming a conductive layer stack including a first sub-layer, a second sub-layer and a third sub-layer, each of the first sub-layer and the second sub-layer includes a transparent conductive material including indium-containing oxide, the third sub-layer is disposed between the first sub-layer and the second sub-layer, and the third sub-layer includes silver or silver alloy; performing an etching process, an etching solution is used to etch the first sub-layer, the second sub-layer and the third sub-layer to form a first patterned sub-layer, a second patterned sub-layer and a third patterned sub-layer, and the etching solution includes 1 to 2.6 wt % of nitric acid, 35 to 45 wt % of acetic acid, 35 to 45 wt % of phosphoric acid and a remaining amount of water.
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公开(公告)号:US12117699B1
公开(公告)日:2024-10-15
申请号:US18637483
申请日:2024-04-17
Applicant: HANNSTAR DISPLAY CORPORATION
Inventor: Li-Fang Chiu , Ching-Chieh Lee , Chun-Chieh Wang
IPC: G02F1/1333 , G02F1/1335 , G02F1/1337 , G02F1/1343 , G02F1/1362 , G02F1/1368
CPC classification number: G02F1/13439 , G02F1/133792 , G02F1/1333 , G02F1/133553 , G02F1/136227 , G02F1/1368
Abstract: This invention discloses an etching solution and a manufacturing method of a display panel. The method includes following steps: providing a substrate; forming a conductive layer stack including a first sub-layer, a second sub-layer and a third sub-layer on the substrate, the first sub-layer includes molybdenum, the second sub-layer is disposed on the first sub-layer and includes a transparent conductive material including indium-containing oxide, the third sub-layer is disposed between the first sub-layer and the second sub-layer and includes silver or silver alloy; performing an etching process, the first sub-layer, the second sub-layer and the third sub-layer are etched by an etching solution to form a first patterned sub-layer, a second patterned sub-layer and a third patterned sub-layer. The etching solution includes 1 to 3 wt % of nitric acid, 30 to 50 wt % of acetic acid, 30 to 50 wt % of phosphoric acid and a remaining amount of water.
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