公开(公告)号：US10481325B2

公开(公告)日：2019-11-19

申请号：US15503836

申请日：2016-03-02

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiwen Cui ,  Kunpeng Feng ,  Hong Dang ,  Shiyuan Zhao ,  Junying Li ,  Jiubin Tan

IPC: G02B6/02 ,  G01B11/16 ,  G02B6/04 ,  G11B11/00

Abstract: A fabrication method of a multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part based on the capillary self-assembly technique, wherein the diameter of the fiber (6) inscribed with FBG is reduced using a mechanical method or an etch method by the hydrofluoric acid; the fibers (6) inscribed with FBG, whose diameter has been reduced, are inserted into a tube (7) through its terminal with an inner taper angle; the FBG terminals of these fibers (6) are immersed into the UV adhesive (10) of a low viscosity and the UV adhesive (10) is raised in the gaps between the fibers (6); or the UV adhesive is dropped on these fibers (6) and the capillary bridge between the fibers (6) is formed; a most compact structure of the fiber bundle is formed as a result of the capillary self-assembly; the fiber bundle is cured using a UV light and the multi-core FBG (11) is therefore formed; the terminal of the multi-core FBG (11) is polished with an optic fiber polishing machine and then a spherical tip is fabricated with the melting fiber method or the installation method of a micro ball; therefore, a multi-core FBG (11) probe can be achieved. The method features low crosstalk between signal of FBG, inexpensive and low insertion loss.

公开(公告)号：US10082383B2

公开(公告)日：2018-09-25

申请号：US15555028

申请日：2016-03-04

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiwen Cui ,  Shiyuan Zhao ,  Kunpeng Feng ,  Hong Dang ,  Junying Li ,  Jiubin Tan

IPC: G01B11/00 ,  G02B6/02 ,  G01B11/16 ,  G01B5/012 ,  H01S3/067 ,  H01S3/16

CPC classification number: G01B11/007 ,  G01B5/012 ,  G01B11/18 ,  G02B6/02042 ,  H01S3/06791 ,  H01S3/1608

Abstract: A method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fiber Bragg grating probe are provided, wherein a multi-core FBG probe with FBGs (12,29) inscribed in the core or cores out of the center of the multi-core fiber is used to transform the two-dimensional or three-dimensional contact displacement into the spectrum shifts with a high sensitivity. At the meantime, the FBGs in the multi-core FBG probe (12,29) work as the wavelength selection device of the fiber laser, the wavelength of the fiber laser will change thereby. So the contact displacement is finally converted into the wavelength change of the fiber laser. The method and equipment have the advantage of high sensitivity, low probing force, compact structure, high inspecting aspect ratio and immunity to environment interference.