公开(公告)号：US12287198B1

公开(公告)日：2025-04-29

申请号：US18595318

申请日：2024-03-04

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Haijin Fu ,  Xiaobo Su ,  Liang Yu ,  Pengcheng Hu ,  Xizheng Liu ,  Xin Yang

IPC: G01B9/02 ,  G01B9/02001

Abstract: A heterodyne laser interferometer and a measurement method based on an integrated dual polarization beam-splitting assembly is provided. Technical points: The first polarization beam splitter and the second polarization beam splitter of the integrated dual polarization beam-splitting assembly are arranged in parallel. The first polarization beam splitter is attached with a first polarizer, a third polarizer, and a first quarter-wave plate; The second polarization beam splitter is attached with a second polarizer, a fourth polarizer, and a second quarter-wave plate; The output optical path of the first quarter-wave plate and the second quarter-wave plate is equipped with target mirrors, while the output optical path of the third quarter-wave plate and the fourth quarter-wave plate is equipped with photodetectors. The assembly and adjustment of the present invention is more flexible and reduce the processing difficulty and processing error.