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公开(公告)号:US20140209469A1
公开(公告)日:2014-07-31
申请号:US13752868
申请日:2013-01-29
Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Inventor: Graeme Scott , Kevin Dooley , Lorraine Byrne , Pat J. Reilly
CPC classification number: C25D1/04 , B82B3/0033 , B82Y40/00 , C23C18/1633 , C25D1/006 , G03F7/0002 , G03F7/038 , G03F7/2004 , G03F7/2006 , G03F7/2037 , G03F7/2039 , H05K1/09 , H05K3/0023 , H05K3/007 , H05K3/20 , H05K2203/0548 , H05K2203/1142 , Y10S977/762 , Y10S977/882 , Y10S977/932
Abstract: Controlling dimensions of nanowires includes lithographically forming a trench in a layer of a polymer resin with a width less than one micrometer where the polymer resin has a thickness less than one micrometer and is deposited over an electrically conductive substrate, depositing a nanowire material within the trench to form a nanowire, and obtaining the nanowire from the trench with a removal mechanism.
Abstract translation: 纳米线的控制尺寸包括在宽度小于1微米的聚合物树脂层中光刻形成沟槽,其中聚合物树脂具有小于1微米的厚度并沉积在导电衬底上,在沟槽内沉积纳米线材料 形成纳米线,用去除机构从沟槽获得纳米线。
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公开(公告)号:US20170191176A1
公开(公告)日:2017-07-06
申请号:US15459272
申请日:2017-03-15
Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Inventor: Graeme Scott , Kevin Dooley , Lorraine Byrne , Pat J. Reilly
IPC: C25D1/04 , C23C18/16 , G03F7/00 , H05K3/20 , G03F7/038 , H05K1/09 , H05K3/00 , C25D1/00 , G03F7/20
CPC classification number: C25D1/04 , B82B3/0033 , B82Y40/00 , C23C18/1633 , C25D1/006 , G03F7/0002 , G03F7/038 , G03F7/2004 , G03F7/2006 , G03F7/2037 , G03F7/2039 , H05K1/09 , H05K3/0023 , H05K3/007 , H05K3/20 , H05K2203/0548 , H05K2203/1142 , Y10S977/762 , Y10S977/882 , Y10S977/932
Abstract: Controlling dimensions of nanowires includes lithographically forming a trench in a layer of a polymer resin with a width less than one micrometer where the polymer resin has a thickness less than one micrometer and is deposited over an electrically conductive substrate, depositing a nanowire material within the trench to form a nanowire, and obtaining the nanowire from the trench with a removal mechanism.
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公开(公告)号:US09631291B2
公开(公告)日:2017-04-25
申请号:US13752868
申请日:2013-01-29
Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Inventor: Graeme Scott , Kevin Dooley , Lorraine Byrne , Pat J. Reilly
CPC classification number: C25D1/04 , B82B3/0033 , B82Y40/00 , C23C18/1633 , C25D1/006 , G03F7/0002 , G03F7/038 , G03F7/2004 , G03F7/2006 , G03F7/2037 , G03F7/2039 , H05K1/09 , H05K3/0023 , H05K3/007 , H05K3/20 , H05K2203/0548 , H05K2203/1142 , Y10S977/762 , Y10S977/882 , Y10S977/932
Abstract: Controlling dimensions of nanowires includes lithographically forming a trench in a layer of a polymer resin with a width less than one micrometer where the polymer resin has a thickness less than one micrometer and is deposited over an electrically conductive substrate, depositing a nanowire material within the trench to form a nanowire, and obtaining the nanowire from the trench with a removal mechanism.
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