公开(公告)号：US20160299080A1

公开(公告)日：2016-10-13

申请号：US15036241

申请日：2014-09-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Manabu SHIOZAWA ,  Koichi WATANABE ,  Masataka SHIRAI ,  Kentaro OSAWA

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N2021/653 ,  G01N2201/06113 ,  G01N2201/0638

Abstract: To measure a surface state, reflective CARS is suitable in terms of the signal intensity. However, with the reflective CARS, it has been difficult to identify the surface position because the shape information is not acquired. Thus, a reflective CARS microscope is combined with a high-resolution phase sensor. The surface position is identified with the phase sensor, and reflected CARS generated from the surface is detected, so that composition analysis is performed.

Abstract translation: 为了测量表面状态，反射CARS在信号强度方面是合适的。 然而，对于反射CARS，由于未获取形状信息，因此难以识别表面位置。 因此，反射CARS显微镜与高分辨率相位传感器组合。 用相位传感器识别表面位置，并检测从表面产生的反射CARS，从而进行组成分析。