公开(公告)号：US20230349832A1

公开(公告)日：2023-11-02

申请号：US18308138

申请日：2023-04-27

Applicant: HORIBA FRANCE SAS

Inventor： Patrick CHAPON

IPC: G01N21/68 ,  G01B11/22 ,  G01N21/67

CPC classification number: G01N21/68 ,  G01B11/22 ,  G01N21/67 ,  G01N2201/0634 ,  G01N2201/0635

Abstract: Disclosed is a glow discharge spectrometry device including a glow discharge lamp and an optical emission spectrometer adapted to receive a light beam emitted by a glow discharge plasma. The optical emission spectrometer includes a dispersive optical component and an echelle grating arranged and configured in such a way as to form a two-dimensional spectrum of the light beam, the two-dimensional spectrum being dispersed in a plurality of diffraction orders, the plurality of diffraction orders extending along a first direction and each diffraction order extending spectrally according to a second direction transverse to the first direction and a pixel-array CMOS sensor arranged and configured to acquire the two-dimensional spectrum as a function of time.