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公开(公告)号:US20020113144A1
公开(公告)日:2002-08-22
申请号:US09998794
申请日:2001-12-03
Applicant: Hitachi, Ltd.
Inventor: Min Huang , Atsumu Hirabayashi
IPC: B05B007/06
CPC classification number: B05B7/0876 , B05B7/066 , B05B7/0892 , G01N21/714 , Y10T436/24
Abstract: Disclosed herein is a nebulizer capable of performing spraying over a wide flow-rate range from a low flow rate to a high flow rate stably and with high efficiency. Further, the present invention provides a supersonic nebulizer capable of improving the efficiency of spraying by a supersonic region spray gas, and a supersonic array nebulizer wherein a plurality of spray units are placed in array form.