公开(公告)号：US20210310865A1

公开(公告)日：2021-10-07

申请号：US17349225

申请日：2021-06-16

Applicant: Hitachi High-Tech Corporation

Inventor： Kei SHIMURA ,  Mizuki OKU ,  Kenji AIKO

IPC: G01J3/10 ,  G01N21/3581 ,  G02F1/39 ,  G01J3/02 ,  G01J3/32 ,  G01J3/42 ,  G02F1/37

Abstract: This far-infrared spectroscopy device is provided with: a variable wavelength far-infrared light source that generates first far-infrared light; an illuminating optical system that irradiates a sample with the first far-infrared light; a detecting nonlinear optical crystal that converts second far-infrared light into near-infrared light using pump light, said second far-infrared light having been transmitted from the sample; and a far-infrared image-forming optical system that forms an image of the sample in the detecting nonlinear optical crystal. The irradiation position of the first far-infrared light on the sample does not depend on the wavelength of the first far-infrared light.