IMAGE PROCESSING APPARATUS, DISTORTION-CORRECTED MAP CREATION APPARATUS, AND SEMICONDUCTOR MEASUREMENT APPARATUS
    1.
    发明申请
    IMAGE PROCESSING APPARATUS, DISTORTION-CORRECTED MAP CREATION APPARATUS, AND SEMICONDUCTOR MEASUREMENT APPARATUS 有权
    图像处理装置,失真校正地图创建装置和半导体测量装置

    公开(公告)号:US20140341461A1

    公开(公告)日:2014-11-20

    申请号:US14370360

    申请日:2012-10-03

    Abstract: Image processing apparatus includes: interpolation process image acquisition means for acquiring an interpolation process image of prescribed size which includes an interpolation point of an inputted image; Fourier transform means for subjecting the interpolation process image which is acquired with the interpolation process image acquisition means to Fourier transform; phase change means for changing, a phase of each value of the transformed interpolation process image which has been subjected to Fourier transform by the Fourier transform means, such that the interpolation point migrates to a desired nearby integer coordinate position; inverse Fourier transform means for subjecting the interpolation process image whose phase has been changed by the phase change means, to inverse Fourier transform; interpolation value determination means for adopting an interpolation point, a value of a pixel at the integer coordinate position, from the transformed interpolation process image subjected to inverse Fourier transform by the inverse Fourier transform means.

    Abstract translation: 图像处理装置包括:内插处理图像获取装置,用于获取包括输入图像的内插点的规定大小的内插处理图像; 傅立叶变换装置,用于对由内插处理图像获取装置获取的内插处理图像进行傅里叶变换; 相位改变装置,用于改变由傅立叶变换装置进行傅里叶变换的变换后的内插处理图像的每个值的相位,使得插值点迁移到期望的邻近整数坐标位置; 逆傅里叶变换装置,用于对由相变装置改变的相位的内插处理图像进行逆傅里叶变换; 内插值确定装置,用于通过傅里叶逆变换装置进行逆傅里叶变换的变换后的内插处理图像,采用内插点,即整数坐标位置处的像素值。

    Image processing apparatus, distortion-corrected map creation apparatus, and semiconductor measurement apparatus
    2.
    发明授权
    Image processing apparatus, distortion-corrected map creation apparatus, and semiconductor measurement apparatus 有权
    图像处理装置,失真校正图生成装置和半导体测量装置

    公开(公告)号:US09514528B2

    公开(公告)日:2016-12-06

    申请号:US14370360

    申请日:2012-10-03

    Abstract: Image processing apparatus includes: interpolation process image acquisition means for acquiring an interpolation process image of prescribed size which includes an interpolation point of an inputted image; Fourier transform means for subjecting the interpolation process image which is acquired with the interpolation process image acquisition means to Fourier transform; phase change means for changing, a phase of each value of the transformed interpolation process image which has been subjected to Fourier transform by the Fourier transform means, such that the interpolation point migrates to a desired nearby integer coordinate position; inverse Fourier transform means for subjecting the interpolation process image whose phase has been changed by the phase change means, to inverse Fourier transform; interpolation value determination means for adopting an interpolation point, a value of a pixel at the integer coordinate position, from the transformed interpolation process image subjected to inverse Fourier transform by the inverse Fourier transform means.

    Abstract translation: 图像处理装置包括:内插处理图像获取装置,用于获取包括输入图像的内插点的规定大小的内插处理图像; 傅立叶变换装置,用于对由内插处理图像获取装置获取的内插处理图像进行傅里叶变换; 相位改变装置,用于改变由傅立叶变换装置进行傅里叶变换的变换后的内插处理图像的每个值的相位,使得插值点迁移到期望的邻近整数坐标位置; 逆傅里叶变换装置,用于对由相变装置改变的相位的内插处理图像进行逆傅里叶变换; 内插值确定装置,用于通过傅里叶逆变换装置进行逆傅里叶变换的变换后的内插处理图像,采用内插点,即整数坐标位置处的像素值。

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