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    OPTICAL MEASUREMENT APPARATUS
    1.
    发明申请
    OPTICAL MEASUREMENT APPARATUS 有权
    光学测量装置

    公开(公告)号：US20150092196A1

    公开(公告)日：2015-04-02

    申请号：US14503560

    申请日：2014-10-01

    Applicant: Hitachi-LG Data Storage, Inc.

    Inventor： Kentaro OSAWA

    IPC: G01B9/02

    CPC classification number: G01B9/02091 ,  A61B5/0066 ,  G01B9/02025 ,  G01B9/02059 ,  G01B9/02081 ,  G01B2290/70

    Abstract: A clear image of a target to be measured is obtained by suppressing influence of a reflected beam from the surface of the target or a measurement target holding unit. A laser beam emitted from a light source is split into a signal beam, reference beam, and control beam. The signal beam is focused onto the target with an objective lens, so the target is irradiated with the signal beam. The amount of defocus of the control beam is controlled with a defocus control unit, and the phase of the control beam is controlled with a phase control unit. A signal beam reflected or scattered by the target is combined with the control beam to generate a controlled signal beam, and the controlled signal beam is combined with the reference beam. A plurality of interference beams with different phases are generated with interference optics, and phase diversity detection is performed.

    Abstract translation: 通过抑制来自目标或测量对象保持单元的表面的反射光束的影响来获得要测量的目标的清晰图像。 从光源发射的激光束被分成信号光束，参考光束和控制光束。 信号光束用物镜聚焦在目标上，所以目标被信号光束照射。 用散焦控制单元控制控制光束的散焦量，并且通过相位控制单元控制控制光束的相位。 由目标反射或散射的信号光束与控制光束组合以产生受控信号光束，受控信号光束与参考光束组合。 利用干涉光学器件生成具有不同相位的多个干涉光束，并执行相位分集检测。

    OPTICAL IMAGE MEASUREMENT APPARATUS AND OPTICAL IMAGE MEASUREMENT METHOD
    2.
    发明申请
    OPTICAL IMAGE MEASUREMENT APPARATUS AND OPTICAL IMAGE MEASUREMENT METHOD 审中-公开

    公开(公告)号：US20180120084A1

    公开(公告)日：2018-05-03

    申请号：US15784383

    申请日：2017-10-16

    Applicant: Hitachi-LG Data Storage, Inc.

    Inventor： Kentaro OSAWA

    IPC: G01B9/02

    Abstract: Exemplary embodiments relate to providing an optical image measurement apparatus that is capable of acquiring information on birefringence of a sample while suppressing size and cost of the apparatus. In the present disclosure: second measurement light different from first measurement light is generated using a passive optical element that generates light of second polarization state different from first polarization state; a time when the first measurement light is irradiated onto a sample is adjusted at a first time, and a time when the second measurement light is irradiated onto the sample is adjusted at a second time different from the first time.

    OPTICAL IMAGE MEASURING APPARATUS
    4.
    发明申请
    OPTICAL IMAGE MEASURING APPARATUS 有权
    光学图像测量装置

    公开(公告)号：US20160054113A1

    公开(公告)日：2016-02-25

    申请号：US14795289

    申请日：2015-07-09

    Applicant: Hitachi-LG Data Storage, Inc.

    Inventor： Kentaro OSAWA ,  Naoko SENDA ,  Daisuke TOMITA

    IPC: G01B9/02 ,  G01J3/02

    CPC classification number: G01B9/02091 ,  G01B9/02058 ,  G01B9/02063 ,  G01B9/02081 ,  G01B9/02083 ,  G01B9/02087 ,  G01J3/0289 ,  G06T5/50 ,  G06T2207/10101 ,  G06T2207/20224

    Abstract: A clear image of a measurement target in optical coherence tomography (OCT) is obtained while suppressing influence of reflected light from a specific portion. Included are a laser beam source, a beam splitter that splits a laser beam into a signal beam and reference beam; an objective lens that focuses the signal beam onto a measurement target in a container, a unit that moves the signal beam focus position, an objective lens that focuses the reference beam, a reflecting mirror, a flat plate arranged between the objective lens and reflecting mirror, and interference optics that combine the signal beam reflected by the measurement target with the reference beam reflected by the reflecting mirror and having passed through the objective lens. Three or more interference beams with different phases, and photodetectors that detect the interference beams are generated, and two of the objective lenses are the same lenses.

    Abstract translation: 在抑制来自特定部分的反射光的影响的同时，获得光学相干断层摄影（OCT）中的测量对象的清晰图像。 包括激光束源，将激光束分裂成信号光束和参考光束的分束器; 将信号束聚焦在容器中的测量对象物上的物镜，移动信号束聚焦位置的单元，聚焦参考光束的物镜，反射镜，布置在物镜和反射镜之间的平板 以及将由测量对象反射的信号光束与由反射镜反射并经过物镜反射的参考光束组合的干涉光学元件。 产生具有不同相位的三个或更多个干涉光束，以及检测干涉光束的光电检测器，并且两个物镜是相同的透镜。

    OPTICAL MEASURING DEVICE
    5.
    发明申请
    OPTICAL MEASURING DEVICE 有权
    光学测量装置

    公开(公告)号：US20170059300A1

    公开(公告)日：2017-03-02

    申请号：US15208686

    申请日：2016-07-13

    Applicant: Hitachi-LG Data Storage, Inc.

    Inventor： Kentaro OSAWA ,  Hiroyuki MINEMURA ,  Yumiko ANZAI

    IPC: G01B9/02

    CPC classification number: G01B9/02091

    Abstract: Provided is an optical measuring device that can realize a wide measurement region without an increase in the measurement time or a reduction in the measurement region while avoiding damage to a measurement target due to excessive light exposure, using a simple configuration. The device includes a light source, an optical splitting unit configured to split a light beam emitted from the light source into a signal beam and a reference beam, an objective lens configured to focus the signal beam and irradiate a measurement target with the signal beam, a scanning unit configured to move the focus position of the signal beam, an optical element having lower transmissivity in its peripheral portion than in its central portion, interference optics configured to combine the reference beam with the signal beam reflected or scattered by the measurement target, thereby generating interference beams, and photodetectors configured to detect the respective interference beams.

    Abstract translation: 提供了一种光学测量装置，其可以使用简单的配置在不增加测量时间的情况下实现宽的测量区域，或者减少测量区域，同时避免由于过度的曝光而导致的测量目标的损坏。 所述装置包括光源，光分离单元，被配置为将从所述光源发射的光束分解为信号光束和参考光束;物镜，被配置为聚焦所述信号光束并用所述信号光束照射测量对象; 扫描单元，被配置为移动信号光束的聚焦位置，在其周边部分中的透射率低于其中心部分的光学元件，被配置为将参考光束与由测量对象反射或散射的信号光束组合的干涉光学元件， 从而产生干涉光束，以及被配置为检测各个干涉光束的光电检测器。

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