Method for manufacturing the magnetic field sensor module
    5.
    发明授权
    Method for manufacturing the magnetic field sensor module 有权
    磁场传感器模块的制造方法

    公开(公告)号:US09570676B2

    公开(公告)日:2017-02-14

    申请号:US15215631

    申请日:2016-07-21

    Abstract: In the method of manufacturing a magnetoresistive sensor module, at first a composite arrangement out of a semiconductor substrate and a metal-insulator arrangement is provided, wherein a semiconductor circuit arrangement is integrated adjacent to a main surface of the semiconductor substrate into the same, wherein the metal-insulator arrangement is arranged on the main surface of the semiconductor substrate and comprises a structured metal sheet and insulation material at least partially surrounding the structured metal sheet, wherein the structured metal sheet is electrically connected to the semiconductor circuit arrangement. Then, a magnetoresistive sensor structure is applied onto a surface of the insulation material of the composite arrangement, and finally an electrical connection between the magnetoresistive sensor structure and the structured metal sheet is established, so that the magnetoresistive sensor structure is connected to the integrated circuit arrangement.

    Abstract translation: 在制造磁阻传感器模块的方法中,首先提供从半导体衬底和金属 - 绝缘体布置中的复合布置,其中半导体电路布置与半导体衬底的主表面相邻地集成在其中,其中 金属绝缘体布置在半导体衬底的主表面上并且包括结构化金属片和至少部分地围绕结构化金属片的绝缘材料,其中结构化金属片电连接到半导体电路装置。 然后,将磁阻传感器结构施加到复合布置的绝缘材料的表面上,最后建立磁阻传感器结构和结构金属片之间的电连接,使得磁阻传感器结构连接到集成电路 安排。

    XMR SENSOR DEVICE
    6.
    发明申请
    XMR SENSOR DEVICE 有权
    XMR传感器设备

    公开(公告)号:US20160025819A1

    公开(公告)日:2016-01-28

    申请号:US14804454

    申请日:2015-07-21

    Inventor: Klemens Pruegl

    CPC classification number: G01R33/0005 G01R33/09

    Abstract: Sensor devices and methods are provided where a second magnetoresistive sensor stack is provided on top of a first magnetoresistive sensor stack.

    Abstract translation: 提供传感器装置和方法,其中第二磁阻传感器堆叠设置在第一磁阻传感器堆叠的顶部。

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