公开(公告)号：US20140070340A1

公开(公告)日：2014-03-13

申请号：US14081017

申请日：2013-11-15

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Dawn D. HALL ,  Mark C.H. LAMOREY ,  Anthony K. STAMPER

IPC: H01H59/00 ,  G06F17/50

CPC classification number: H01H59/0009 ,  B81B2201/014 ,  G06F17/5068 ,  H01H11/00 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not actuated.

Abstract translation: 提供常闭（关闭）微机电开关（MEMS），制造方法和设计结构。 一种结构包括梁结构，该梁结构包括铰链在第一电极上并与第二电极电接触的第一端，处于其未被致动的自然状态。

公开(公告)号：US20160225569A1

公开(公告)日：2016-08-04

申请号：US15093808

申请日：2016-04-08

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Dawn D. HALL ,  Mark C.H. LAMOREY ,  Anthony K. STAMPER

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B2201/014 ,  G06F17/5068 ,  H01H11/00 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not actuated.

Abstract translation: 提供常闭（关闭）微机电开关（MEMS），制造方法和设计结构。 一种结构包括梁结构，该梁结构包括铰链在第一电极上并与第二电极电接触的第一端，处于其未被致动的自然状态。