ARRAY OBJECTIVE LENS MODULE AND OPTICAL INTERFERENCE MICROSCOPY SYSTEM

    公开(公告)号:US20240310614A1

    公开(公告)日:2024-09-19

    申请号:US18544446

    申请日:2023-12-19

    CPC classification number: G02B21/0032 G02B21/0056 G02B21/02 G02B25/001

    Abstract: An array objective lens module, having an optical axis and including a substrate, multiple lens frames, and multiple objective lens sets is provided. The substrate includes multiple accommodating vias. Each accommodating via includes an internal thread structure. The lens frames are respectively disposed in the accommodating vias. Each lens frame includes an external thread structure. The external thread structure is adapted to the internal thread structure. The objective lens sets are respectively disposed in the lens frames. Each objective lens set includes at least one lens, and a relative position of each frame and the substrate in an extension direction of the optical axis changes according to a relative rotation angle of the corresponding external read structure and internal thread structure.

    ARRAY LENS MODULE CALIBRATION EQUIPMENT AND CALIBRATION METHOD THEREOF

    公开(公告)号:US20240310241A1

    公开(公告)日:2024-09-19

    申请号:US18391629

    申请日:2023-12-20

    CPC classification number: G01M11/0257 G02B3/0012

    Abstract: An array lens module calibration equipment includes a carrying platform, a visual positioning module, a laser alignment module, a depth-of-field measurement module, and a coplanarity adjustment module. An array lens module has an optical axis and includes a substrate, a calibration via through the substrate, a plurality of lens frames, and a plurality of lens sets. The visual positioning module is configured to provide a visual positioning beam and capture an image of an appearance to obtain appearance information. The laser alignment module is configured to provide a calibration laser beam so as to obtain alignment information. The depth-of-field measurement module is configured to capture a depth-of-field image to obtain depth-of-field information. The coplanarity adjustment module is configured to adjust relative positions of the plurality of lens frames relative to the substrate in an optical axis direction based on the appearance information, the alignment information, and the depth-of-field information.

Patent Agency Ranking