公开(公告)号：US09347838B2

公开(公告)日：2016-05-24

申请号：US13896333

申请日：2013-05-17

Applicant: Industrial Technology Research Institute

Inventor： Sheng-Jui Chen ,  Gwo-Jen Wu ,  Chung-Lin Wu ,  Jian-Lin Huang

IPC: G01L1/14 ,  G01L5/22 ,  B25J13/08

CPC classification number: G01L1/142 ,  B25J13/083 ,  G01L5/226

Abstract: A capacitive shear force sensor and a method for fabricating thereof are provided. The capacitive shear force sensor includes a first electric field shielding layer, a second electric field shielding layer, a driving electrode, a first sensing electrode, a second sensing electrode and a dielectric layer. The second electric field shielding layer is disposed under the first electric field shielding layer. The driving electrode is disposed between the first electric field shielding layer and the second electric field shielding layer. The first and the second sensing electrodes are disposed between the driving electrode and the second electric field shielding layer. The dielectric layer is disposed between the driving electrode and the first sensing electrode, and between the driving electrode and the second sensing electrode. The first sensing electrode and the driving electrode form a first capacitor. The second sensing electrode and the driving electrode form a second capacitor.

Abstract translation: 提供了一种电容式剪切力传感器及其制造方法。 电容式剪切力传感器包括第一电场屏蔽层，第二电场屏蔽层，驱动电极，第一感测电极，第二感测电极和电介质层。 第二电场屏蔽层设置在第一电场屏蔽层的下方。 驱动电极设置在第一电场屏蔽层和第二电场屏蔽层之间。 第一和第二感测电极设置在驱动电极和第二电场屏蔽层之间。 电介质层设置在驱动电极和第一感测电极之间以及驱动电极和第二感测电极之间。 第一感测电极和驱动电极形成第一电容器。 第二感测电极和驱动电极形成第二电容器。

公开(公告)号：US20140174204A1

公开(公告)日：2014-06-26

申请号：US13896333

申请日：2013-05-17

Applicant: Industrial Technology Research Institute

Inventor： Sheng-Jui Chen ,  Gwo-Jen Wu ,  Chung-Lin Wu ,  Jian-Lin Huang

IPC: G01L1/14

CPC classification number: G01L1/142 ,  B25J13/083 ,  G01L5/226

Abstract: A capacitive shear force sensor and a method for fabricating thereof are provided. The capacitive shear force sensor includes a first electric field shielding layer, a second electric field shielding layer, a driving electrode, a first sensing electrode, a second sensing electrode and a dielectric layer. The second electric field shielding layer is disposed under the first electric field shielding layer. The driving electrode is disposed between the first electric field shielding layer and the second electric field shielding layer. The first and the second sensing electrodes are disposed between the driving electrode and the second electric field shielding layer. The dielectric layer is disposed between the driving electrode and the first sensing electrode, and between the driving electrode and the second sensing electrode. The first sensing electrode and the driving electrode form a first capacitor. The second sensing electrode and the driving electrode form a second capacitor.

Abstract translation: 提供了一种电容式剪切力传感器及其制造方法。 电容式剪切力传感器包括第一电场屏蔽层，第二电场屏蔽层，驱动电极，第一感测电极，第二感测电极和电介质层。 第二电场屏蔽层设置在第一电场屏蔽层的下方。 驱动电极设置在第一电场屏蔽层和第二电场屏蔽层之间。 第一和第二感测电极设置在驱动电极和第二电场屏蔽层之间。 电介质层设置在驱动电极和第一感测电极之间以及驱动电极和第二感测电极之间。 第一感测电极和驱动电极形成第一电容器。 第二感测电极和驱动电极形成第二电容器。