公开(公告)号：US20230219807A1

公开(公告)日：2023-07-13

申请号：US18174280

申请日：2023-02-24

Applicant: Infineon Technologies AG

Inventor： Hong Chen ,  Michael Reinhold ,  Juergen Roeber ,  Andreas Wiesbauser

IPC: B81B7/00 ,  H02J50/05

CPC classification number: B81B7/007 ,  B81B7/0029 ,  H02J50/05

Abstract: A device includes a readout circuit coupled between an input node and an output node; a microelectromechanical systems (MEMS) device coupled to the input node; and a first charge controlled clamp circuit coupled between the input node and a first bias node.